Proven Overhaul Sevices For Implant module (Oct. 2010) International Equipment Technology
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1 Proven Overhaul Sevices For Implant module (Oct. 2010)
2 CONTENTS 1 PROCESS FLOW MAP E220/500 E1000/VIISion80(200) VIISta SERIES 5 AXCELIS SERIES 6 LOCALIZATION PARTS
3 PROCESS FLOW MAP STEP#1 STEP#2 STEP#3 STEP#4 RECIVE INSPECTION (BEFORE) Function check Fail parts Missing parts REPORT & QUOTATION Inspection report STD price + add parts P/O FROM CUSTOMER Waiting STEP#8 STEP#7 STEP#6 STEP#5 SUPPLY TEST ASSEMBLY (PARTS CHANGE) CLEANING Packing(Vacuum) Alignment Function Vacuum Cooling leak STD change parts Add parts Contamination Scratch With Chemical
4 E220 / R O P L AT 2. T I LT E R 3. M A N I P U L AT O R 4. T V L FA R A D AY 5. 2 S T E P R E D U C E R 6. S E T- U P C U P 7. C C I G 8. R E TA I N E R B O A R D 9. R O P L AT C A B L E 1 0. WA L K O U T S E N S O R 11. A I R B E A R I N G
5 E220/ Roplat Assembly Foreign : Taiwan, China etc Domestic : 2Weeks Domestic : 14 sets Foreign : 49 sets
6 E220/ Tilter Assembly Foreign : Taiwan, China etc Domestic : 2Weeks Domestic : 10 sets Foreign : 47 sets
7 E220/ Manipulator Assembly Foreign : Taiwan, China etc Domestic : 2Weeks Domestic : 12 sets Foreign : 5 sets
8 E220/ TVL Faraday Assembly Foreign : Taiwan, China etc Domestic : 3Weeks Domestic : 8 sets Foreign : 2 sets
9 E220/ Step Reducer Assembly Foreign : Taiwan, China etc Domestic : 3Weeks Domestic : 4 sets
10 E220/ Set-Up Cup Assembly Foreign : Taiwan, China etc Domestic : 3Weeks Domestic : 5 sets
11 E220/ CCIG Assembly Foreign : Taiwan, China etc Domestic : 2Weeks Domestic : 35 sets Foreign : 10 sets
12 E220/ Retainer Board Assembly Foreign : Taiwan, China etc Domestic : 2Weeks Domestic : 13 sets
13 E220/ Roplat Cable Assembly Foreign : Taiwan, China etc Domestic : 3Weeks Domestic : 7 sets Foreign : 3 sets
14 E220/ Walkout Sensor Assembly Foreign : Taiwan, China etc Domestic : 4Weeks Domestic : 5 sets
15 E220/ Air Bearing Foreign : Taiwan, China etc Domestic : 8Weeks Foreign : 10Weeks Domestic : 2 sets
16 E1000/VIISion 1. M A N I P U L AT O R 2. H O O K S I T E 3. A C C E L E R AT I O N T U B E 4. WA L K O U T S E N S O R 5. S P I L L O V E R C U P
17 E1000/VIISion 1. Manipulator Assembly Domestic : 2Weeks Domestic : 12 sets
18 E1000/VIISion 2. Hook Site Assembly Domestic : 10Weeks Foreign : 10Weeks Domestic : 2 sets Foreign : 6 sets
19 E1000/VIISion 3. Acceleration Tube Assembly Domestic : 8Weeks(with Si Coating) Foreign : 8Weeks(with Si Coating) Domestic : 2 sets Foreign : 3 sets
20 E1000/VIISion 4. Walkout Sensor Assembly Domestic : 8Weeks Foreign : 10Weeks Domestic : 5 sets
21 E1000/VIISion 5. Spillover Cup Assembly Domestic : 10Weeks(with Si Coating) Foreign : 10Weeks(with Si Coating) Domestic : 5 sets Foreign : 15 sets
22 VIISta Series 1. T I LT E R 2. M A N I P U L AT O R 3. P R O F I L E R 4. R E S O LV I N G 5. O R I E N T E R 6. C A R T R I D G E 7. P R O F I L E R C U P 8. E S C P L AT E N 9. C C I G 10. C a r t r i d g e C a b l e M o d i f y 11. A I R B E A R I N G
23 VIISta Series 1. Tilter Assembly Domestic : 4Weeks Domestic : 2 sets
24 VIISta Manipulator Assembly Domestic : 3Weeks Domestic : 11 sets
25 VIISta Manipulator Assembly Domestic : 3Weeks Domestic : 11 sets
26 VIISta HC 2. Manipulator Assembly Domestic : 3Weeks Domestic : 11 sets
27 VIISta Series 3. Profiler Assembly Domestic : 3Weeks Domestic : 2 sets
28 VIISta Series 4. Resolving Assembly Domestic : 3Weeks Domestic : 3 sets
29 VIISta Series 5. Orientor Assembly Domestic : 3Weeks Domestic : 2 sets
30 VIISta Series 6. Cartridge Assembly Domestic : 3Weeks Domestic : 12 sets Foreign : 2 sets
31 VIISta Series 7. Profiler Cup Assembly Domestic : 3Weeks Domestic : 2 sets
32 VIISta Series 8. ESC Platen Assembly Domestic : 10Weeks Foreign : 10Weeks Domestic : 3 sets
33 VIISta Series 9. CCIG Assembly Domestic : 3Weeks Domestic : 3 sets
34 VIISta Series 10. Cartridge Cable Repair Domestic : 1Weeks Foreign : 2Weeks Domestic : 2 sets
35 VIISta Series 11. Air Bearing Assembly Domestic : 8Weeks Foreign : 10Weeks Domestic : 3 sets
36 AXCELIS 1. MANIPULATOR (GSD-HE) 2. MANIPULATOR (GSD-160) 3. MANIPULATOR (GSD-200) 4. I/S HEAD CONNECTOR 5. DISC COOLING TEMP SENSOR 6. AIR PRESSURE 7. ARM CHUCK SENSOR 8. Relief Valve Roughing Line modify 9. DISC & SITE
37 AXCELIS 1. Manipulator Assembly (GSD-HE) Domestic : 3Weeks Domestic : 12 sets
38 AXCELIS 2. Manipulator Assembly (GSD-160) Domestic : 3Weeks Domestic : 7 sets
39 AXCELIS 3. Manipulator Assembly (GSD-200) Domestic : 3Weeks Domestic : 5 sets
40 AXCELIS 4. Ion Source Head Connector Modify Domestic : 3Weeks Domestic : 8 sets
41 AXCELIS 5. Disc Cooling Temperature Sensor Domestic : 3Weeks Domestic : 4 sets
42 AXCELIS 6. Air Pressure Domestic : 3Weeks Domestic : 6 sets
43 AXCELIS 7. Arm Chuck Sensor Domestic : 3Weeks Domestic : 6 sets
44 AXCELIS 8. Relief Valve Roughing Line Modify Domestic : 3Weeks Domestic : 3 sets
45 AXCELIS 9. Disc & Site Assembly (with Anodize & Elastomer) Domestic : 10Weeks Foreign : 12Weeks Domestic : 2 sets
46 LOCALIZATION PARTS 1. INCH CONVERSION 4. SILICON COATING 2. QUNTUM X(AMAT) CLAMPING CONTROL ASS Y 3. RTP LAMP 5. FILAMENT POWER CABLE 6. CARTRIDGE FEEDTHRU 7. LIGHT LINK 8. OTHERS
47 LOCALIZATION PARTS 1-1. Inch Conversion (E220/500) Domestic : 4Weeks Foreign : 6Weeks Domestic : 4 sets SIZE : 3, 4, 5, 6, 8Inch Kit (Handler, Cassette..)
48 LOCALIZATION PARTS 1-2. Inch Conversion (E1000/VIISion) Domestic : 4Weeks Foreign : 6Weeks Domestic : 4 sets SIZE : 6, 8INCH KIT (Handler, Cassette..)
49 LOCALIZATION PARTS 2. AMAT Implanter (Quntum X) Clamping Control Assembly Domestic : 4Weeks Foreign : 6Weeks Domestic : 5 sets
50 LOCALIZATION PARTS 3. RTP Lamp Assembly Domestic : 4Weeks Foreign : 6Weeks Domestic : 5 sets
51 LOCALIZATION PARTS 4. Silicon Coating Domestic : 4Weeks Foreign : 6Weeks Domestic : 28 sets Foreign : 31 sets Si Coating of parts is possible for all equipment
52 LOCALIZATION PARTS 5. Filament Power Cable Domestic : 3Weeks Domestic : 8 sets
53 LOCALIZATION PARTS 6. Cartridge Feed-thru Assembly Domestic : 3Weeks Domestic : 14 sets
54 LOCALIZATION PARTS 7. Light Link Domestic : 3Weeks Domestic : 8 sets
55 LOCALIZATION PARTS 8. Others ITEMS Consumable Parts Filament Filament Insulator Arc Chamber Graphite Ceramic Aluminum Parts Stainless Steel etc supply is possible for all equipment Domestic : 4Weeks Domestic : Foreign :
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