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November 5, 2012 Dainippon Screen Mfg. Co., Ltd. Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto 602-8585, Japan CONSOLIDATED FINANCIAL REPORT FOR THE SECOND QUARTER ENDED SEPTEMBER 30, 2012 [Japanese GAAP] Dainippon Screen Mfg. Co., Ltd. is listed on the First Section of the Tokyo Stock Exchange and Osaka Securities Exchange with the securities code number 7735. (URL:http//www.screen.co.jp/) Representative: For Inquiries: Masahiro Hashimoto, President (COO) Hirofumi Ohta, General Manager of Accounting Department Tel: +81-75-414-7155 Figures have been rounded down to eliminate amounts less than one million yen, except per share figures. PERFORMANCE FOR THE SECOND QUARTER ENDED SEPTEMBER 30, 2012 (APR. 1, 2012-SEPT. 30, 2012) (Millions of yen, except per share figures) (Percentage are the rate of increase or decrease from the previous corresponding period.) (1) Business Results Six months ended Sept. 30, 2012 Six months ended Sept. 30, 2011 Net Sales 95,853 Percentage Change -22.1% 123,021 11.4 Note: Comprehensive income Six months ended Sept. 30, 2012: (12,061) million ( %) Six months ended Sept. 30, 2011: 3,423 million ( -29.0%) Operating Income (3,531) Percentage Change 9,000-18.5 Ordinary Income % (3,697) Percentage Change % 8,815-19.6 Net Income Percentage Change Net Income per Share (Yen) Diluted Net Income per Share (Yen) Six months ended Sept. 30, 2012 Six months ended Sept. 30, 2011 (9,160) % 6,531-31.9 (38.59) 27.51 % (2) Financial Position Total Assets Net Assets Equity Ratio (%) Sept. 30, 2012 212,481 77,340 36.1% Mar. 31, 2012 245,381 90,595 36.7 Note: Equity As of Sept. 30, 2012: As of Mar. 31, 2012: 76,788 million 90,068 million Net Assets per Share of Capital Stock (Yen) 323.50 379.44 1 Consolidated

CASH DIVIDENDS Record date First Quarter -end Second Quarter -end Cash Dividends per Share Third Quarter -end Year-end Annual Fiscal year ended Mar. 31, 2012 Fiscal year ending Mar. 31, 2013 Fiscal year ending Mar. 31, 2013 (Forecast) 5.00 0.00 5.00 0.00 Note: Revision of cash dividends in the second quarter under review: Yes FORECAST OF BUSINESS RESULTS FOR FISCAL YEAR ENDING MARCH 31, 2013 (Millions of yen, except per share figures) (Percentage are the rate of increase or decrease from the previous corresponding period.) Net Sales Percentage Change Operating Income Percentage Change Fiscal year ending Mar. 31, 2013 190,000-24.0 % (7,000) % Fiscal year ending Mar. 31, 2013 NOTES Ordinary Income Percentage Change Net Income Percentage Change Net Income per Share (Yen) (7,500) % (14,000) % (58.98) Note: Revision of business forecast in the second quarter under review: Yes (1) Changes in significant consolidated subsidiaries (Changes in specified subsidiaries involving changes in scope of consolidation): No New Company: Not applicable Exclusion: Not applicable (2) Application of accounting methods specific to the preparation of quarterly consolidated financial statements: Yes Please refer to P.5 [Summary Information (Notes)] for more information. (3) Changes of accounting policies, changes in accounting estimates and retrospective restatement 1. Changes of accounting policies accompanied by revision of accounting standard etc.: Yes 2. Changes of accounting policies other than 1: No 3. Changes in accounting estimates: Yes 4. Retrospective restatement: No Please refer to P.5 [Summary Information (Notes)] for more information. (4) Number of shares outstanding 1. Number of shares outstanding as of end of period (including treasury stock) As of Sept. 30, 2012: 253,974,333 shares As of Mar. 31, 2012: 253,974,333 shares 2. Number of treasury stock as of end of period As of Sept. 30, 2012: 16,609,900 shares As of Mar. 31, 2012: 16,605,094 shares 3. Average number of shares outstanding Six months ended Sept. 30, 2012: 237,367,402 shares Six months ended Sept. 30, 2011: 237,373,695 shares *Indication of quarterly review procedure implementation status This quarterly earnings report is exempt from quarterly review procedure based upon the Financial Instruments and Exchange Law. It is under the review procedure process at the time of disclosure of this report. *Explanation for appropriate use of forecasts and other notes (1) Dainippon Screen has revised our business forecast for the fiscal year ending March 31, 2013 that was previously announced on August 7, 2012, as noted in this financial report. (2) The forward-looking statements such as operational forecasts contained in this document are based on the information currently available to Dainippon Screen and certain assumptions that are regarded as legitimate. Dainippon Screen does not promise that the forecasts or estimates will be accurate. Large discrepancies may be seen in the actual results due to various factors. Please refer to P. 4 Qualitative information regarding consolidated business results forecasts for the assumptions used and other notes. 2 Consolidated

[Qualitative Information, Financial Statements] 1. Qualitative information regarding the status of consolidated business results During the first half of the fiscal year ending March 31, 2013, the six-month period from April 1, 2012 to September 30, 2012, the global economy showed signs of slowdown, with the European economy bogged by a prolonged debt problem, the U.S. economy lacking strength due to the delayed recovery in employment, and a marked slowdown of emerging economies, including China, due to the drop in exports to the European market and weakened domestic demand. The Japanese economy continued to face difficulties due to the deterioration of overseas economies resulting in a decline in exports, prolonged yen appreciation, and delayed implementation of economic policies because of political turmoil, although there were signs of recovery in domestic demand due to such factors as demand spurred by reconstruction from the March 2011 earthquake. With regard to the business conditions surrounding the Dainippon Screen Group, capital investment in the semiconductor industry remained strong among certain semiconductor manufacturers, backed by increased demand for such mobile devices as smartphones and tablets. There were, however, increasing signs that many other semiconductor manufacturers were holding down capital investment due to uncertainties in the economic outlook and weak demand for personal computers. In LCD panel-related industries, capital investment declined considerably among LCD panel manufacturers due to rapid business downturn. Amid such circumstances, the Dainippon Screen Group posted consolidated net sales of 95,853 million for the first half of the fiscal year ending March 31, 2013, a decrease of 27,167 million, or 22.1%, from the corresponding period of the previous fiscal year. On the earnings front, the plunge in sales resulted in an operating loss of 3,531 million, compared with an operating income of 9,000 million in the corresponding period of the previous fiscal year, and an ordinary loss of 3,697 million, compared with an ordinary income of 8,815 million a year before. Turning to extraordinary losses, the Dainippon Screen Group posted a loss on valuation of investment securities due to the fall in market values of stocks held. In addition, the Group recorded income taxesdeferred (income tax expense) following a partial reversal of deferred tax assets. As a result, the Group posted a net loss of 9,160 million for the first half of the fiscal year ending March 31, 2013, compared with a net income of 6,531 million in the corresponding period of the previous fiscal year Performance by reportable segment is explained below. The Semiconductor Equipment (SE) Segment In the Semiconductor Equipment segment, looking by product, sales of single-wafer cleaning equipment increased in response to the advance of miniaturization of semiconductors; however, sales plunged for batch-type cleaning equipment. By geographical region, although sales to the Asian market increased, domestic sales and sales to the U.S. and European markets decreased. As a result, net sales in this segment amounted to 68,526 million, a drop of 15,892 million, or 18.8% year on year. On the earnings front, the worsening profit ratio due to the change in sales mix and low facility utilization in addition to the major drop in sales resulted in an operating loss of 2,703 million, compared with an operating income of 9,339 million in the corresponding period of the previous fiscal year. The FPD Equipment (FE) segment In the FPD Equipment segment, the stagnation of demand for TV sets caused a decrease in sales of production equipment for large-sized LCD panels In addition, sales of production equipment for small- and medium-sized high-definition LCD panels also remained sluggish. Consequently, net sales in this segment amounted to 4,503 million, down 68.7% year on year. On the earnings front, operating loss in this segment was reduced to 627 million, compared with an operating loss of 1,059 million in the corresponding period of the previous fiscal year. This was mainly due to a reduction in fixed costs resulting from the transfer of the R&D department for the alternative energy field, despite the significant decrease in sales. The Media and Precision Technology (MP) Segment In the Media and Precision Technology segment, sales of graphic arts equipment decreased from the corresponding period of the previous fiscal year, reflecting falling sales of print on demand (POD) equipment although sales of computer to plate (CTP) equipment increased spurred by replacement demand mainly in Japan. Sales of printed circuit board (PCB)-related equipment were essentially unchanged year on year. As a result, net sales in this segment amounted to 22,524 million, down 5.7% from the corresponding period of the previous fiscal year. On the earnings front, this segment posted an operating income of 700 million, a year-on-year decrease of 32.4%. 3 Consolidated

2. Qualitative information regarding changes in consolidated financial position Total assets as of September 30, 2012 stood at 212,481 million, a decrease of 32,900 million, or 13.4%, compared with March 31, 2012. The decrease was mainly due to lower balances of cash and time deposits as well as notes and accounts receivabletrade. Total liabilities amounted to 135,140 million, down 19,645 million, or 12.7%, compared with the end of the previous fiscal year. This largely reflected the decrease in notes and accounts payabletrade. Interest-bearing debt decreased by 1,765 million, or 3.7%, from March 31, 2012, to 45,910 million. Net interest-bearing debt, or interest-bearing debt minus cash and time deposits, increased by 6,124 million, or 61.2%, compared with the previous fiscal year-end, to 16,137 million. Total net assets amounted to 77,340 million, down 13,255 million, or 14.6%, from March 31, 2012. This was mainly attributable to the decrease in retained earnings due to the payment of cash dividends and posting of a net loss. Accounting for the aforementioned factors, the equity ratio at the end of the first half under review came to 36.1%. Status of Cash Flows The status of cash flows for the first half of the fiscal year ending March 31, 2013 is as follows. Net cash used in operating activities amounted to 1,081 million, compared with 2,820 million net cash provided by operating activities in the corresponding period of the previous fiscal year. For the period under review, total cash inflows including depreciation and amortization as well as the decrease in notes and accounts receivabletrade were insufficient to offset such cash outflows as the loss before income taxes, the increase in inventories, and the decrease in notes and accounts payabletrade. Net cash used in investing activities amounted to 2,891 million, compared with 755 million used in investing activities in the corresponding period of the previous fiscal year. This was attributable to the purchase of property, plant and equipment such as equipment for R&D. Net cash used in financing activities amounted to 2,974 million, compared with 12,693 million provided by financing activities in the corresponding period of the previous fiscal year. This was mainly due to the repayment of long-term loans payable and finance lease obligations as well as the payment of cash dividends. As a result, cash and cash equivalents as of September 30, 2012 totaled 27,811 million, a decrease of 7,820 million from March 31, 2012. 3. Qualitative information regarding consolidated business results forecasts Regarding future economic conditions, the economic uncertainty is expected to persist due to the prolongation of the European debt problem, issues relating to the U.S. economy, a deceleration in economic activity in emerging countries including China, as well as concerns about the economic impact by the scheduled elections and replacements of top leaders in some major countries. Turning to business conditions surrounding the Dainippon Screen Group s principal fields of business, semiconductor manufacturers are expected to curtail capital investment even further against the backdrop of the uncertain economic environment and prolonged weak demand for personal computers. Under these conditions, Dainippon Screen has revised its consolidated business forecast for the fiscal year ending March 31, 2013, from the previously announced forecast on August 7, 2012 as listed below. This is mainly attributable to the prospect that sales and profit in the Semiconductor Equipment segment are likely to fall short of the previous forecast. In view of a prospect of posting a large amount of loss as shown below in the business forecast, it is with regret that we will be obliged to revise our dividends forecast for the fiscal year ending March 31, 2013 from 5.00 to 0.00 per share. For more details, please refer to today s announcement Notice: Semi-Annual Business Forecast Differences with its Results, Full-Year Business Forecast Revision, Reversal of Deferred Tax Assets and Dividends Forecast Revision. Business forecast Fiscal year ending Mar. 31, 2013 Fiscal year ending Mar. 31, 2013 N e t S a l e s 190,000 S E 129,000 F E 12,500 M P 47,500 OTHERS 1,000 O p e r a t i n g l o s s (7,000) O r d i n a r y l o s s (7,500) N e t l o s s (14,000) *Intersegment transactions have been eliminated. 4 Consolidated

Against the backdrop of this extremely harsh business environment, the Dainippon Screen Group will work diligently to reduce variable costs as well as other costs. Simultaneously, with an eye to the next fiscal year and beyond, the Group will further endeavor to lower the break-even point by quickly implementing steps aimed at improving its earnings structure. To ensure future capital stability, the Group has secured an additional 10 billion commitment line agreement. Together with existing agreements, the Group has now shored up its capital raising ability by securing, in total, a 30 billion commitment Note: The aforementioned forecasts are based on foreign currency exchange rate estimates of US$1.00 = 80 and EUR1.00 = 100. Business forecasts are also made in accordance with currently available information and rational assumptions. Dainippon Screen does not promise that the forecasts or estimates will be accurate. Therefore, it should be noted that actual results could differ significantly due to a variety of factors. [ Summary Information (Notes) ] 1. Changes in significant consolidated subsidiaries (Changes in specified subsidiaries involving changes in scope of consolidation): None 2. Application of accounting methods specific to the preparation of quarterly consolidated financial statements: Calculation of income taxes Income tax amount is calculated principally by multiplying reasonably estimated annual effective tax rate through the second quarter ended September 30, 2012, with the effects of deferred taxes reflected, by the amount of year-to-date income before income taxes. When calculation using reasonably estimated annual effective tax rate causes irrational results, income tax amount is calculated based on the legal tax rate. In the second quarter ended September 30, 2012, as a result of reviewing the realizability of deferred tax assets at beginning of period due to the significant change in business environment, income taxes (a reversal of deferred tax assets) of 3,550 million were posted. 3. Changes of accounting policies, changes in accounting estimates and retrospective restatement: Changes of accounting policies (Changes in depreciation method) From the first quarter under review, following the revision of the Corporation Tax Act, Dainippon Screen and its consolidated domestic subsidiaries changed the depreciation method based on the revised Corporation Tax Act for property, plant and equipment acquired on or after April 1, 2012. The effect of this change on profit for the first half under review is immaterial. 5 Consolidated

CONSOLIDATED BALANCE SHEETS ASSETS Mar. 31, Sept. 30, 2012 2012 Current assets: Cash and time deposits 37,662 29,772 Notes and accounts receivable-trade 72,949 52,259 Merchandise and finished goods 28,175 29,955 Work in process 23,381 22,503 Raw materials and supplies 5,561 5,637 Deferred tax assets 7,213 3,611 Other 3,724 3,934 Allowance for doubtful accounts (1,125) (944) Total current assets 177,543 146,730 Noncurrent assets: Property, plant and equipment: Buildings and structures 50,928 50,889 Machinery, equipment and vehicles 29,282 29,815 Other 28,648 29,771 Accumulated depreciation (70,190) (70,804) Total property, plant and equipment 38,669 39,671 Intangible assets: Other 2,145 2,397 Total intangible assets 2,145 2,397 Investments and other assets: Investment securities 21,147 17,789 Other 7,346 7,520 Allowance for doubtful accounts (1,469) (1,628) Total investments and other assets 27,024 23,681 Total noncurrent assets 67,838 65,750 Total assets 245,381 212,481 6 Consolidated

CONSOLIDATED BALANCE SHEETS Dainippon Screen Mfg. Co., Ltd. Mar. 31, Sept. 30, 2012 2012 LIABILITIES Current liabilities: Notes and accounts payable-trade 81,458 67,622 Short-term loans payable 8,049 8,075 Current portion of long-term loans payable 1,649 2,049 Current portion of bonds payable 7,000 7,000 Lease obligations 1,347 830 Income taxes payable 1,586 986 Notes payable-facilities 606 754 Provision for directors' bonuses 58 26 Provision for product warranties 5,522 5,153 Provision for loss on order received 246 532 Other 15,698 12,808 Total current liabilities 123,223 105,841 Noncurrent liabilities: Bonds payable 19,000 19,000 Long-term loans payable 6,988 5,765 Lease obligations 3,641 3,189 Provision for retirement benefits 315 352 Provision for directors' retirement benefits 109 118 Asset retirement obligations 48 48 Other 1,459 824 Total noncurrent liabilities 31,562 29,298 Total liabilities 154,786 135,140 NET ASSETS Shareholders equity: Capital stock 54,044 54,044 Capital surplus 4,583 4,583 Retained earnings 55,439 45,093 Treasury stock (12,240) (12,243) Total shareholders equity 101,827 91,477 Accumulated other comprehensive income: Valuation difference on available-for-sale securities 1,385 (346) Foreign currency translation adjustment (13,144) (14,342) Total accumulated other comprehensive income (11,758) (14,689) Minority interests: 527 552 Total net assets 90,595 77,340 Total liabilities and net assets 245,381 212,481 7 Consolidated

CONSOLIDATED STATEMENTS OF INCOME Apr.1, 2011 Sept. 30, 2011 Apr.1, 2012 Sept. 30, 2012 Net sales 123,021 95,853 Cost of sales 90,143 75,812 Gross profit 32,877 20,041 Selling, general and administrative expenses 23,877 23,573 Operating income (loss) 9,000 (3,531) Non-operating income Interest income 48 34 Dividends income 229 228 Other 723 303 Total non-operating income 1,001 566 Non-operating expenses Interest expenses 743 485 Foreign exchange losses 35 43 Other 407 202 Total non-operating expenses 1,185 732 Ordinary income (loss) 8,815 (3,697) Extraordinary income Other 0 0 Total extraordinary income 0 0 Extraordinary loss Loss on valuation of investment securities 1,212 1,120 Loss on disaster 18 Other 5 0 Total extraordinary loss 1,236 1,120 Income (loss) before income taxes 7,578 (4,818) Income taxes 1,065 4,314 Income (loss) before minority interests 6,513 (9,132) Minority interests in income (loss) (17) 27 Net income (loss) 6,531 (9,160) 8 Consolidated

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME Apr.1, 2011 Sept. 30, 2011 Apr.1, 2012 Sept. 30, 2012 Income (loss) before minority interests 6,513 (9,132) Other comprehensive income Valuation difference on available-for-sale securities (1,232) (1,732) Deferred gains or losses on hedges 20 Foreign currency translation adjustment (1,878) (1,195) Total other comprehensive income (3,090) (2,928) Comprehensive income 3,423 (12,061) (Comprehensive income attributable to) Owners of the parent 3,434 (12,090) Minority interests (10) 29 9 Consolidated

CONSOLIDATED STATEMENTS OF CASH FLOWS Dainippon Screen Mfg. Co., Ltd. Apr.1, 2011- Sept. 30, 2011 Apr.1, 2012 Sept. 30, 2012 Cash flow from operating activities: Income (loss) before income taxes 7,578 (4,818) Depreciation and amortization 2,435 2,203 Loss (gain) on valuation of investment securities 1,212 1,120 Increase (decrease) in provision for retirement benefits 100 37 Increase (decrease) in provision for directors' bonuses (39) (31) Increase (decrease) in provision for product warranties (137) (351) Increase (decrease) in provision for loss on order received 3 286 Interest and dividends income (277) (262) Interest expenses 743 485 Decrease (increase) in notes and accounts receivable-trade 8,431 20,653 Decrease (increase) in inventories (1,716) (2,094) Decrease (increase) in other current assets 282 (76) Increase (decrease) in notes and accounts payable-trade (10,671) (14,680) Increase (decrease) in accrued expenses (631) (98) Increase (decrease) in other current liabilities (2,673) (1,679) Other, net (228) (8) Subtotal 4,412 682 Interest and dividends income received 290 281 Interest expenses paid (739) (486) Contribution in connection with the shift to a definedcontribution pension plan (57) (17) Income taxes paid (1,086) (1,541) Net cash provided by (used in) operating activities 2,820 (1,081) Cash flow from investing activities: Decrease (increase) in time deposits (191) 41 Purchase of property, plant and equipment (1,265) (2,837) Proceeds from sales of property, plant and equipment 1,363 269 Payments from purchase of investments in subsidiaries resulting in change in scope of consolidation (313) Other, net (348) (364) Net cash used in investing activities (755) (2,891) 10 Consolidated

CONSOLIDATED STATEMENTS OF CASH FLOWS Apr.1, 2011 Sept. 30, 2011 Apr.1, 2012 Sept. 30, 2012 Cash flow from financing activities: Net increase (decrease) in short-term loans payable (497) 25 Proceeds from long-term loans payable 3,000 Repayments of long-term loans payable (6,259) (822) Repayments of finance lease obligations (1,250) (982) Proceeds from issuance of bonds 18,895 Net decrease (increase) in treasury stock (2) (2) Cash dividends paid (1,186) (1,186) Cash dividends paid to minority shareholders (4) (4) Net cash provided by (used in) financing activities 12,693 (2,974) Effect of exchange rate change on cash and cash equivalents (1,426) (873) Net increase (decrease) in cash and cash equivalents 13,330 (7,820) Cash and cash equivalents at beginning of period 38,383 35,631 Cash and cash equivalents at end of period 51,713 27,811 11 Consolidated

SEGMENT INFORMATION [Segment Information] Second quarter ended Sept. 30, 2011 Net sales and income (loss) in reportable segment Sales SE Reportable segment *1 FE MP Total Other *2 Total Adjustments *3 Consolidated *4 (1)Sales to outside customers 84,418 14,404 23,874 122,697 324 123,021 123,021 (2)Intersegment sales and transfers 4,239 4,239 (4,239) Total 84,418 14,404 23,874 122,697 4,563 127,260 (4,239) 123,021 Segment income (loss) 9,339 (1,059) 1,036 9,316 (40) 9,275 (275) 9,000 Notes *1 The SE segment develops and manufactures semiconductor production equipment and conducts sales and maintenance services. The FE segment develops, manufactures, and markets FPD production equipment, and it also conducts maintenance services. In the MP segment, graphic arts equipment and PCB related equipment are developed, manufactured, sold and maintained. *2 The Other category incorporates operations not included in reportable segments, including software development, planning and production of printed matter, logistics operations and other businesses. *3 Segment operating income (loss) adjustment of (275) million is the corporate expense not apportioned in each reportable segment. Corporate expense mainly comprises the headquarters general and administrative expenses not usually attributed to segments. *4 Segment income (loss) is adjusted with operating income under consolidated statements of income. Second quarter ended Sept. 30, 2012 Net sales and income (loss) in reportable segment Sales Reportable segment *1 SE FE MP Total Other *2 Total Adjustments *3 Consolidated *4 (1)Sales to outside customers 68,526 4,503 22,524 95,553 300 95,853 95,853 (2)Intersegment sales and transfers Total 68,526 4,503 22,524 95,553 3,686 3,686 (3,686) 3,986 99,540 (3,686) 95,853 Segment income (loss) (2,703) (627) 700 (2,630) (134) (2,765) (766) (3,531) Notes *1 The SE segment develops and manufactures semiconductor production equipment and conducts sales and maintenance services. The FE segment develops, manufactures, and markets FPD production equipment, and it also conducts maintenance services. In the MP segment, graphic arts equipment and PCB related equipment are developed, manufactured, sold and maintained. *2 The Other category incorporates operations not included in reportable segments, including software development, planning and production of printed matter, logistics operations and other businesses. *3 Segment operating income (loss) adjustment of (766) million is the corporate expense not apportioned in each reportable segment. Corporate expense mainly comprises the headquarters general and administrative expenses not usually attributed to segments. *4 Segment income (loss) is adjusted with operating loss under consolidated statements of income. 12 Consolidated

Consolidated Financial Highlights for the Second Quarter Ended Sept. 30, 2012 (Figures less than one million yen have been omitted and other figures have been rounded.) FY2012 FY2013 FY2012 FY2013 6 months ended 6 months ended Difference 12 months ended 12 months ending Sept. 30, 2011 Sept. 30, 2012 Mar.31, 2012 Mar.31, 2013 Result Result Amount Percentage Result Forecast Net sales 123,021 95,853 (27,167) -22.1% 250,089 190,000 Operating income 9,000 (3,531) (12,532) 13,498 (7,000) [to net sales ratio] 7.3 % -3.7 % -11.0 pt 5.4 % -3.7 % Ordinary income 8,815 (3,697) (12,513) 12,284 (7,500) [to net sales ratio] 7.2 % -3.9 % -11.1 pt 4.9 % -3.9 % Net income 6,531 (9,160) (15,691) 4,637 (14,000) [to net sales ratio] 5.3 % -9.6 % -14.9 pt 1.9 % -7.4 % Total assets 254,079 212,481 * (32,900) -13.4% 245,381 Net assets 89,828 77,340 * (13,255) -14.6% 90,595 Equity 89,362 76,788 * (13,279) -14.7% 90,068 Equity ratio 35.2 % 36.1 % * -0.6 pt 36.7 % Net assets per share 376.47 323.50 * (55.94) -14.7% 379.44 Interest-bearing debt 69,778 45,910 * (1,765) -3.7% 47,676 Net interest-bearing debt 16,296 16,137 * 6,124 61.2% 10,013 Cash flows from operating activities 2,820 (1,081) 11,278 Cash flows from investing activities (755) (2,891) (4,162) Cash flows from financing activities 12,693 (2,974) (9,467) Depreciation and amortization 2,435 2,203 (232) -9.5% 4,985 5,100 Capital expenditures 2,228 4,029 1,800 80.8% 7,346 9,500 R&D expenses 6,544 6,597 53 0.8% 13,888 13,000 Number of employees 4,889 4,999 * 109 2.2% 4,890 Number of consolidated subsidiaries 44 45 * 1 44 [Domestic] [20] [21] * [1] [20] [Overseas] [24] [24] * [ ] [24] Number of affiliates 1 1 * 1 [Number of affiliates accounted for by equity method] [1] [1] * [ ] [1] * show changes in amount from Mar. 31, 2012 13 Consolidated

Sales Breakdown (Consolidated) FY2012 FY2013 3 months ended 3 months ended 6 months ended 3 months ended 3 months ended 12 months ended 3 months ended 3 months ended 6 months ended 12 months ending Jun. 30, 2011 Sept. 30, 2011 Sept. 30, 2011 Dec. 31, 2011 Mar. 31, 2012 Mar.31, 2012 Jun. 30, 2012 Sept. 30, 2012 Sept. 30, 2012 Mar.31, 2013 Result Result Result Result Result Result Result Result Result Forecast Semiconductor Equipment FPD Equipment Media and Precision Technology Other Graphic Arts Equipment PCB Equipment Grand Total Domestic 8,668 13,159 21,827 3,048 7,510 32,387 2,771 7,147 9,918 Overseas 39,571 23,019 62,590 25,922 46,692 135,206 31,960 26,647 58,607 Total 48,239 36,178 84,418 28,971 54,203 167,593 34,731 33,795 68,526 129,000 Domestic 383 2,194 2,577 3,734 2,597 8,908 272 1,852 2,125 Overseas 4,717 7,109 11,827 6,730 5,144 23,702 1,627 750 2,377 Total 5,100 9,303 14,404 10,464 7,742 32,611 1,900 2,602 4,503 12,500 Domestic 4,077 5,449 9,526 3,969 6,646 20,142 4,355 5,627 9,983 Overseas 6,991 7,356 14,347 6,639 8,034 29,021 5,621 6,918 12,540 Total 11,068 12,806 23,874 10,608 14,680 49,163 9,977 12,546 22,524 47,500 Domestic 3,328 4,808 8,136 3,573 5,201 16,911 3,939 4,724 8,664 Overseas 6,246 6,594 12,840 6,246 7,564 26,651 5,027 5,986 11,014 Total 9,574 11,403 20,977 9,820 12,765 43,563 8,967 10,711 19,678 41,000 Domestic 749 640 1,389 396 1,444 3,230 416 903 1,319 Overseas 744 762 1,507 392 470 2,369 593 932 1,525 Total 1,493 1,402 2,896 788 1,915 5,600 1,009 1,835 2,845 6,500 Domestic 138 174 313 149 234 697 137 148 285 Overseas 4 6 11 7 5 23 8 6 14 Total 142 181 324 156 239 721 145 154 300 1,000 Domestic 13,267 20,977 34,244 10,902 16,988 62,135 7,536 14,776 22,312 Overseas 51,284 37,492 88,776 39,299 59,877 187,954 39,217 34,323 73,541 Total 64,551 58,470 123,021 50,202 76,866 250,089 46,754 49,099 95,853 190,000 Overseas Ratio 79.4% 64.1% 72.2% 78.3% 77.9% 75.2% 83.9% 69.9% 76.7% Orders received & Order backlog (Consolidated) FY2012 3 months ended Sept. 30, 2011 3 months ended Dec. 31, 2011 3 months ended Mar. 31, 2012 FY2013 3 months ended Jun. 30, 2012 3 months ended Sept. 30, 2012 Orders received Order backlog Orders received Order backlog Orders received Order backlog Orders received Order backlog Orders received Order backlog Semiconductor Equipment FPD Equipment Media and Precision Technology Other Graphic Arts Equipment PCB Equipment Grand Total Domestic 6,552 7,799 6,573 11,323 2,170 5,983 3,813 7,025 4,879 4,757 Overseas 26,266 50,267 36,532 60,876 27,091 41,274 34,468 43,782 20,591 37,725 Total 32,818 58,066 43,104 72,199 29,260 47,256 38,281 50,807 25,470 42,482 Domestic 778 5,881 1,228 3,374 1,110 1,887 693 2,308 5,241 5,697 Overseas 1,939 16,131 792 10,192-482 4,565 414 3,351 777 3,378 Total 2,718 22,011 2,020 13,566 628 6,452 1,107 5,659 6,018 9,074 Domestic 4,937 1,040 4,326 1,396 6,350 1,100 4,449 1,193 5,398 963 Overseas 6,227 3,359 7,871 4,590 6,753 3,309 6,796 4,483 5,136 2,700 Total 11,164 4,399 12,197 5,987 13,103 4,409 11,245 5,676 10,533 3,663 Domestic 4,334 874 3,757 1,057 5,126 981 4,059 1,101 4,340 716 Overseas 5,869 3,182 6,951 3,886 6,709 3,030 5,480 3,483 4,930 2,426 Total 10,202 4,055 10,708 4,943 11,834 4,012 9,539 4,583 9,270 3,142 Domestic 604 167 569 339 1,224 119 389 92 1,058 247 Overseas 358 177 920 705 45 279 1,316 1,000 206 274 Total 961 344 1,489 1,044 1,269 397 1,705 1,093 1,264 521 Domestic Overseas Total Domestic 12,267 14,720 12,126 16,094 9,630 8,970 8,955 10,526 15,518 11,417 Overseas 34,432 69,756 45,195 75,658 33,362 49,148 41,677 51,616 26,504 43,802 Total 46,700 84,476 57,321 91,752 42,992 58,118 50,633 62,142 42,022 55,219 73.7% 82.6% 78.8% 82.5% 77.6% 84.6% 82.3% 83.1% 63.1% 79.3% Overseas Ratio 14 Consolidated