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INVESTOR PRESENTATION Q1 2016 RESULTS April 21, 2016 April 24, 2015 ASM proprietary information 2016 ASM

CAUTIONARY NOTE REGARDING FORWARD-LOOKING STATEMENTS Cautionary Note Regarding Forward-Looking Statements: All matters discussed in this press release, except for any historical data, are forward-looking statements. Forwardlooking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to, economic conditions and trends in the semiconductor industry generally and the timing of the industry cycles specifically, currency fluctuations, corporate transactions, financing and liquidity matters, the success of restructurings, the timing of significant orders, market acceptance of new products, competitive factors, litigation involving intellectual property, shareholder and other issues, commercial and economic disruption due to natural disasters, terrorist activity, armed conflict or political instability, epidemics and other risks indicated in the Company's reports and financial statements. The Company assumes no obligation nor intends to update or revise any forward-looking statements to reflect future developments or circumstances. April 21, 2016 ASM proprietary information 2

INVESTMENT HIGHLIGHTS ALD is a key growth market ALD market expected to outperform the broader equipment market ASMI has leadership position in ALD Strong revenue performance Revenue increased 23% in 2015 and by 14% at constant currencies Outperforming the overall equipment market Improved profitability Gross margin improved 100bp to 44.1% in 2015, steady at 43.9% in Q1 2016 Solid balance sheet Strong cash position, no debt Free cash flow increased 33% to EUR 104m in 2015 Second consecutive EUR 100m share buyback program, to be executed in 2015/2016 Proposal to the AGM 2016 to raise dividend by 17% to EUR 0.70 per share April 21, 2016 ASM proprietary information 3

Q1 2016 KEY RESULTS - IFRS Q1 2015 Q4 2015 Q1 2016 2014 2015 New orders 158.3 135.4 163.8 602.1 608.4 Net sales 162.0 144.7 142.4 545.6 669.7 Gross profit margin % 43.1% 44.8% 43.9% 43.1% 44.1% Operating results 31.1 4.0 18.8 93.4 111.1 Result from investments 13.0 1.6 6.3 61.9 43.2 Amortization intangible assets resulting from the sale of the 12% stake of ASMPT (6.6) (7.1) (6.8) (22.5) (27.2) Net earnings 61.8 10.8 5.4 138.2 157.3 Normalized net earnings (excl. amortization intangible assets resulting from the sale of the 12% stake of ASMPT) 68.4 17.9 12.2 160.7 184.5 Note that as from 2016 ASMI reports its results based on IFRS instead of US GAAP April 21, 2016 ASM proprietary information 4

SEMICONDUCTOR EQUIPMENT MARKET ASM focuses on deposition equipment ASM is a market leader in ALD Positions in Epitaxy, PECVD and Vertical Furnaces Other Wafer Processes 2.2bn Equipment market segments (US$) Test 3.6bn Assembly 3.3bn Lithography 8.1bn Process Diagnostics 3.9bn Etch and Clean 8.1bn Deposition 8.0bn VLSI Research, Apr. 2016 ASM s focus is on deposition equipment April 21, 2016 ASM proprietary information 5

EQUIPMENT MARKET OUTLOOK Gartner forecasts WFE spending to decrease by 2% in 2016, followed by 7% increase in 2017 Investment in leading edge equipment remains the key driver 45 40 35 30 25 20 15 10 5 0 Wafer Fab Equipment spending +5.0% +16.3% -1.3% -2.0% +6.8% +7.6% -7.7% 2013 2014 2015 2016 2017 2018 2019 Gartner, Apr 2016 Gartner forecasts a slightly lower Wafer Fab Equipment market in 2016 April 21, 2016 ASM proprietary information 6

SEMICONDUCTOR MARKET DRIVERS 2016 semiconductor market growth contribution by electronic application Share of growth in 2016 Smartphone SSD Industrial Automotive Wearables Ultramobile Consumer ex. Wearables Traditional Phone Traditional PC Other 79% 50% 31% 29% 12% 10% -1% -22% -64% -25% -6-4 -2 0 2 4 6 US$bn Gartner, Dec 2015 April 21, 2016 ASM proprietary information 7

WAFER FAB EQUIPMENT SPENDING BY NODE US$bn 40 Share of 14nm, 10nm and 7nm of total Equipment spending increasing in 2016-2018 35 30 25 20 15 10 7nm and below 10nm 14nm 22nm 32nm 45nm 65nm and above 5 0 2014 2015 2016 2017 2018 2019 Gartner, Apr 2016 Advanced nodes: market segments with high expected growth April 21, 2016 ASM proprietary information 8

ALD IS AN ENABLING TECHNOLOGY ALD technology is a key enabler of Moore s Law Strengths of Atomic Layer Deposition: high-precision deposition of smooth and conformal ultra-thin films, even on high aspect ratio structures Device scaling, new materials and 3D architectures increase demand for ALD ASMI has leading positions in ALD Leadership positions in ALD for high-k metal gate applications as well as in ALD for spacer defined multiple patterning and for new applications ALD business accounted for clearly more than half of ASM s equipment revenue in 2015 Strong market outlook ALD Drivers are further deployment of ALD in volume manufacturing, new applications and additional process steps ALD market expected to outperform the broader semiconductor equipment market April 21, 2016 ASM proprietary information 9

ESTIMATED ALD MARKET GROWTH US$m 1,400 1,200 1,000 800 600 400 200 ALD market single wafer / mini-batch ALD market approximately doubling in three to four years, compared to 2014 Key growth areas are patterning layers, high-k/ metal gate, liners and spacers, and other applications 0 2014 2018 Source: Gartner, VLSI, ASMI, February 2016 April 21, 2016 ASM proprietary information 10

COMPETITIVE ADVANTAGES Focused player, differentiated technologies Track record of innovation Global network, streamlined operations Leadership in ALD Developing ALD technology since 1999 Leading market share in ALD Close cooperation with the leading IC manufacturers Strong IP portfolio April 21, 2016 ASM proprietary information 11

CUSTOMER CONCENTRATION Engaged with all of the top-10 semiconductor capital equipment spenders Diversification of customer base from Logic to Memory and Foundries Strong momentum with customers beyond the traditional top-3 100% 75% 50% 25% 0% ASMI revenue 2010 2011 2012 2013 2014 2015 Top 3 Nr 4-10 Rest Growing share of wallet with top clients April 21, 2016 ASM proprietary information 12

HIGHLIGHTS Strong momentum ALD ALD further established as mainstream enabling technology Bookings and revenue continued to be driven by ALD 2016 started with healthy order momentum Revenue in Q1 decreased 2% sequentially, but order intake increased 21% Gross margin relatively stable at 43.9%, EBIT margin at 13.2% Shareholder remuneration Started a second consecutive EUR 100m share buyback program last November, completed for approximately 42% by the end of March 2016 Returned EUR 116m in share buybacks and dividend in 2015 (2014: EUR 61m) Proposal to increase dividends by 17% to EUR 0.70 per share AGM 2016 Intel s Preferred Quality Supplier award On March 10, 2016, ASMI was awarded as one of 26 companies with Intel s Preferred Quality Supplier (PQS) award for performance in 2015 April 21, 2016 ASM proprietary information 13

ASMPT RESULTS Q1 2015 Q4 2015 Q1 2016 2014 2015 Sales ASMPT (HK$m) 3,056 2,928 2,862 14,229 12,977 Net profit ASMPT excluding one-offs (EURm, 100% based) 36 10 16 179 120 Result from investments (including ASMI s 40% share of ASMPT net profit) 13.0 1.6 6.3 61.9 43.2 Amortization intangible assets resulting from the sale of the 12% stake of ASMPT (6.6) (7.1) (6.8) (22.5) (27.2) Result from investments 6.4 (5.5) (0.5) 39.4 16.0 As of 15 March 2013, our share of approximately 40% of ASMPT s net earnings is included in result from investments Amortization intangible assets resulting from the sale of the 12% stake in ASMPT is expected to remain stable in 2016, on a currency comparable basis April 21, 2016 ASM proprietary information 14

FINANCIAL OVERVIEW - IFRS April 21, 2016 ASM proprietary information 15

Q1 2016 HIGHLIGHTS Revenues down 2% q-o-q and down 12% y-o-y Bookings up 21% q-o-q and up 3% y-o-y. Book-to-bill ratio of 1.2 Q1 backlog of EUR 147m, up from EUR 128m at the end of Q4 2015 EBIT margin of 13.2% compared to 2.7% in Q4 2015 and 19.2% in Q1 2015 EBIT in Q4 2015 included impairments of EUR 16m of which EUR 13m write-off of remaining 450mm assets Free cash flow of EUR 5m in Q1 2016 Normalized net earnings* of EUR 12m in Q1 2016, down from EUR 18m in Q4 2015 and EUR 68m in Q1 2015 Normalized net earnings were impacted by translation differences in financial results (negative EUR 11m in Q1 2016, but positive EUR 6m in Q4 and EUR 28m in Q1 2015) and one-off tax benefits of EUR 5m in Q4 * excl. amortization intangible assets resulting from the sale of the 12% stake of ASMPT April 21, 2016 ASM proprietary information 16

FINANCIAL OUTLOOK Based upon the current backlog and our current visibility: For Q2 we expect sales between 130-140 million, while we expect an order intake of 145-165 million, both on a currency comparable level. Based upon the current visibility, we expect a much stronger second half as compared to the first half of 2016. April 21, 2016 ASM proprietary information 17

NET EARNINGS Q1 IFRS EUR million Q1 2015 Q4 2015 Q1 2016 Q1 2016 vs Q4 2015 Q1 2016 vs Q1 2015 New orders 158.3 135.4 163.8 21% 3% Backlog 190.2 127.8 146.8 15% (23)% Book-to-bill 1.0 0.9 1.2 Net sales 162.0 144.7 142.4 (2)% (12)% Gross profit 69.6 64.8 62.5 (4)% (11)% Gross profit margin % 43.1% 44.8% 43.9% Selling, general and administrative expenses (21.3) (23.0) (22.5) (2)% 6% Research and development expenses (17.5) (36.9) (20.8) (44)% 19% Restructuring expenses - (0.9) (0.5) n/a n/a Operating result 31.1 4.0 18.8 14.8 (12.3) Operating margin % 19.2% 2.7% 13.2% Financing costs 28.1 5.8 (11.2) (17.0) (39.3) Income tax (3.8) 6.5 (1.7) (8.2) 2.1 Result from investments 13.0 1.6 6.3 4.7 (6.8) Amortization intangible assets resulting from the sale of the 12% stake of ASMPT (6.6) (7.1) (6.8) 0.2 (0.2) Net earnings 61.8 10.8 5.4 (5.5) (56.5) Normalized net earnings (excl. amortization intangible assets resulting from the sale of the 12% stake of ASMPT) 68.4 17.9 12.2 (5.7) (56.3) Normalized net earnings per share, diluted 1.08 0.28 0.20 (0.08) (0.88) April 21, 2016 ASM proprietary information 18

R&D EXPENDITURE EUR million Q1 2015 Q4 2015 Q1 2016 R&D expenditure (20.4) (25.0) (23.8) Capitalized development expenditure 6.2 5.4 7.1 Amortization capitalized development expenditure (3.3) (1.2) (4.1) Impairment capitalized development expenditure - (16.2) - R&D expenses (17.5) (36.9) (20.8) Impairment capitalized development expenditure in Q4 2015 included EUR 13m for the write off of the remaining 450mm assets Amortization capitalized development expenditure in Q4 2015 included a harmonization of EUR 2.5m which decreased the amortization amount April 21, 2016 ASM proprietary information 19

CASH FLOW EUR million Q1 2015 Q4 2015 Q1 2016 Normalized net earnings 68.4 17.9 12.2 Depreciation and amortization 9.2 24.3 11.8 Result from investments (13.0) (1.6) (6.3) Other adjustments (22.0) (5.3) 10.1 Change in working capital (0.1) 4.3 (8.6) Net cash from operating activities 42.6 39.5 19.0 Capital expenditure (7.7) (10.8) (5.4) Capitalized development expenditure (6.2) (5.4) (7.1) Dividend received from investments - - - Other (0.4) (1.0) (1.2) Net cash from investing activities (14.4) (17.3) (13.7) Dividend paid and capital repaid to ASMI shareholders - - - Share buyback (30.6) (8.4) (32.1) Other 6.2 0.5 8.3 Net cash from financing activities (24.5) (7.9) (23.8) April 21, 2016 ASM proprietary information 20

BALANCE SHEET EUR million Dec 31, 2015 Mar 31, 2016 Cash and cash equivalents 447 416 Accounts receivable 90 100 Inventories 114 109 Other current assets 19 22 Investments and associates 1,181 1,134 Property, plant and equipment 92 91 Capitalized development costs 73 75 Other non-current assets 60 62 Total Assets 2,076 2,010 Accounts payable 54 59 Short-term debt - - Other current liabilities 61 59 Long-term debt - - Other non-current liabilities 13 13 Equity 1,948 1,880 Total Liabilities and Equity 2,076 2,010 April 21, 2016 ASM proprietary information 21

WORKING CAPITAL EUR million 250 200 150 100 50 Days 140 120 100 80 60 0 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 40 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 12 13 14 15 16 12 13 14 15 16 Working capital Quarterly sales Days of working capital April 21, 2016 ASM proprietary information 22

HISTORICAL DEVELOPMENT EUR million EUR million 200 180 160 140 120 100 80 60 250 200 150 100 50 40 30 20 10 0-10 40 20 50-20 -30 0 Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1 10 11 12 13 14 15 16 0 Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1Q2Q3Q4Q1 10 11 12 13 14 15 16-40 Bookings Backlog Net Sales (lhs) EBIT (rhs) April 21, 2016 ASM proprietary information 23

CHANGE TO IFRS REPORTING IN 2016 On Febuary 23, 2016, ASMI announced that as of 2016 it will report results based on IFRS instead of US GAAP. The main difference is in R&D expenses. Under IFRS R&D costs are expensed as incurred, while under IFRS those development costs that meet certain criteria are capitalized. Amortization and impairment, if applicable, of capitalized development costs is included in the R&D expenses. In 2015, R&D expenses amounted to EUR 90m under IFRS and EUR 95m under US GAAP. The difference in R&D expenses is also the main explanation for the difference between the operating and net result in 2015 under IFRS and US GAAP. Excluding the impairment of the remaining 450mm assets (EUR 3m under US GAAP and EUR 13m under IFRS) the R&D expenses in 2015 amounted to EUR 92 million under US GAAP and EUR 77 million under IFRS. During 2016 comparable results based on US GAAP will be presented, as from 2017 only results based on IFRS will be reported. More information can be found in the Q4 2015 and Q1 2016 earnings report, the Statutory annual report 2015, and on our website www.asm.com. April 21, 2016 ASM proprietary information 24

COMPARABLE RESULTS US GAAP EUR million Q1 2015 Q4 2015 Q1 2016 Q1 2016 vs Q4 2015 Q1 2016 vs Q1 2015 Net sales 162.0 144.7 142.4 (2)% (12)% Gross profit 70.1 64.8 62.4 (4)% (11)% Gross profit margin % 43.3% 44.8% 43.8% Selling, general and administrative expenses (21.3) (23.0) (22.5) (2)% 6% Research and development expenses (20.4) (28.3) (23.8) (16)% 17% Restructuring expenses - (0.9) (0.5) n/a n/a Operating result 28.5 12.5 15.6 3.1 (12.9) Operating margin % 17.6% 8.7% 11.0% Financing costs 28.1 5.7 (11.3) (17.0) (39.4) Income tax (3.3) 5.0 (1.2) (6.2) 2.1 Result from investments 13.4 2.2 6.3 4.1 (7.1) Amortization intangible assets resulting from the sale of the 12% stake of ASMPT (6.6) (7.1) (6.8) 0.3 (0.2) Net earnings 60.0 18.4 2.6 (15.8) (57.4) Normalized net earnings (excl. amortization intangible assets resulting from the sale of the 12% stake of ASMPT) 66.6 25.4 9.4 (16.0) (57.2) Normalized net earnings per share, diluted 1.03 0.40 0.16 (0.24) (0.87) April 21, 2016 ASM proprietary information 25

April 21, 2016 ASM proprietary information 26