CONTROLLED DECOMPOSITION OXIDATION LIQUID REAGANT ADDITION

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1 CONTROLLED DECOMPOSITION OXIDATION LIQUID REAGANT ADDITION INSTALLATION, OPERATION, AND MAINTENANCE MANUAL XX Revision 7.2 9/24/03

2 CONTROLLED DECOMPOSITION OXIDATION LIQUID REAGANT ADDITION INSTALLATION, OPERATION, AND MAINTENANCE MANUAL ATMI, Incorporated 7 Commerce Drive Danbury, CT Technical Publications Department 617 River Oaks Parkway San Jose, CA 95134

3 Preface ATMI Corporation has prepared this manual for use by ATMI personnel and customers. The information contained herein is the property of ATMI Corporation. The material in this manual is for informational purposes only and is subject to change without notice. ATMI Corporation assumes no responsibility for omissions or errors that may appear in this manual. The following are the trademarks of ATMI Corporation and are not to be reproduced nor used in any fashion without written approval from ATMI: ATMI Corporation CDO is ATMI Corporation s design concept trademark for Controlled Decomposition/Oxidation. Any reference within this manual to other s trademark and/or copyrighted material is unintentional. All rights reserved. part of this manual in part or in whole may be reproduced or transmitted in any form or by any means, electronic, mechanical or magnetic, including but not limited to photographing, photocopying, recording or any information storage and retrieval system, without the written permission from an officer of ATMI Corporation. ATMI Corporation shall not, under any circumstances, be liable to buyer or any other party for lost profits, diminution of goodwill, or any other special or consequential damages with respect to any claim. In addition, ATMI Corporation s liability for warranty claims shall not, in any event, exceed the invoice price of the product claimed defective, nor shall ATMI be liable for delays in replacement or repair of product. ATMI Publication Number: XX, Revision 7.2 Copyright by ATMI Corporation Revision Rev. Page(s) Changes Date A All Initial Release B,C Chp. 12 Update Schematics D Chp. 11 new packing cartridge, new flow diagram E Chp. 12 Update Schematics F 9-15, Chp.11 & 12 Temp Control setting change and delete of on-off PCB G 5-2, 5-3, 11-5, 8-24 Remove/replace flowmeter switch, add verify reagent flow alarm Add figure and table for RCCM option, change rev to number Chp 12 update schematics ii CDO 863 LRA, IO&M manual XX

4 Table Of Contents Table of Contents Chapter 1: Safety Safety notices and terms CDO safety section End user responsibilities Lockout and tag-out procedure Energized electrical hot work type definitions Chapter 2: Theory of operation Introduction Chapter 3: Facilities requirements Site location requirements Environment Clearance Facilities requirements Chapter 4: Installation Introduction Receipt and unpacking Installation procedure Location Fixed mounting Connecting the CDO Chapter 5: CDO start-up Start-up procedures Verification checklist Verify valve settings and operations Initial start-up Chapter 6: Interlock/sensor operational status Front panel interlock/sensors Chapter 7: CDO Shutdown CDO Shutdown Chapter 8: Preventative maintenance Decontamination procedure Purpose Procedure PPE and equipment XX CDO 863 LRA, IO&M manual TOC-iii

5 Table Of Contents Table of Contents [continued] Medical emergency response Required maintenance equipment Clothing Tools Preventative maintenance guidelines Maintenance procedures Preparing for maintenance procedures Replacing DI water cartridges Removing and inspecting the slope drain Removing the transition section Inspecting the transition section Inspecting the liner Cleaning the liner Rotating the body tube (if needed) Cleaning the inlet assembly (if needed) Inspecting the thermocouple Inspecting the exhaust Magnehelic Removing and inspecting the secondary scrubbing section Cleaning the secondary scrubbing section Inspecting and cleaning the vapor relief line Inspecting the facilities exhaust lines Inspecting the facilities drain line Inspecting the CDO Reassembling the CDO Restoring the CDO to normal operation Performing tank maintenance (as required) Testing the alarms Verify N2 supply and sleeve alarm Verify air (CDA) alarm Verify drain flow alarm Verify water flow alarm Verify inlet pressure alarm Verify sump(s) alarm(s) Verify liquid level sensors Verify the temperature controller Verify the reagent flow alarm Chapter 9: Service operations CDO thermal reaction chamber Heater element TOC-iv CDO 863 LRA, IO&M manual XX

6 Table Of Contents Table of Contents [continued] Testing the heater element Element assembly replacement Water spray nozzle and Y-strainer LED indicators Conductivity liquid level sensor Exhaust temperature sensors RTD probe Bimetallic Sensor Solid state relay (CZR) Nitrogen and air flow sensors Solenoid valves Inlet nitrogen solenoid valve Inlet CDA and Exhaust Moisture Water control solenoid valve Exhaust Moisture Suppression solenoid valve Pneumatically-actuated water control valve Fresh water control Water flow sensors Recirculation and vortex flow Fresh water flow Reagent water flow Thermocouple Testing the thermocouple Thermocouple removal and replacement Temperature controller Wiring Exhaust temperature indication Sump level sensors Low sensor (lowest sensor) High sensor (middle sensor) High/High sensor (sighest sensor) Low, High and High/High sensor adjustment procedure Tank vapor relief line Recirculation pump Sump pump Recirculation and sump valves Liquid level sensor(s) Catch basin sensor Drip pan sensor Temperature lower limit switch (650 C) XX CDO 863 LRA, IO&M manual TOC-v

7 Table Of Contents Table of Contents [continued] 9.21 Nitrogen pressure switch Inlet pressure high and low pressure switches Exhaust moisture suppression Chapter 10: Troubleshooting guide Indicated failures Diagnosing problems Operational status Supply N2 Flow Air Flow Exhaust Temperature Drain Flow H2O Flow Inlet Pressure Sump Pump Reagent Flow Preheater temperature Liquid Level (Drip Tray) Liquid Level (Catch Basin) Over temperature failure Open thermocouple circuit ATMI CDO troubleshooting data form Chapter 11: Parts Lists Chapter 12: Schematics and diagrams Appendix A: Helium leak check procedure...a-1 A.1 Tools...A-1 A.2 Reference documentation...a-2 A.3 Clamshell preparation...a-3 A.4 Helitest startup...a-4 A.5 CDO preparation...a-4 A.6 Helitest probe installation...a-5 A.7 Clamshell installation...a-5 A.8 Bagging...A-7 A.9 Testing...A-7 A.10 Restoration [SM1]...A-8 Appendix B: Typical process gases...b-1 TOC-vi CDO 863 LRA, IO&M manual XX

8 Table of Contents List of Figures Figure 2-1: CDO Cut-Away Figure 3-1: CDO clearance Figure 3-2: Facilities view Figure 3-3: CDO facilities locations and dimensions Figure 4-1: Fixed mounting assembly Figure 4-2: Typical CDO installation Figure 4-3: Exhaust pressure plumbing Figure 4-4: Port locations Figure 4-5: Remote indication box Figure 4-6: CDO power connections Figure 4-7: Flow curves for CDO sump pump Figure 4-8: CDO pump flow diagram Figure 4-9: CDO 863 system flow diagram Figure 5-1: CDO 863 tank plumbing Figure 5-2: Front Panel Figure 8-1: Operation and maintenance pictorial hazards Figure 8-2: DI water assembly Figure 8-3: Torque specification and wire strip length Figure 9-1: Power feedthrough replacement Figure 9-2: Thermocouple removal and replacement Figure 9-3: Temperature controller testing and setup Figure 11-1: Exploded View Figure 11-2: 863 Secondary Scrubbing Plumbing Figure 11-3: Tank Plumbing Parts Figure 11-4: Pneumatic Chamber Drawer Figure 11-5: Preheater Steam Reagent Assembly Figure 11-6: Control Panel Assembly, Drawer Figure 11-7: CDO Tank Electrical Enclosure Figure 11-8: Cabinet Assembly Parts Figure 11-9: CDO Front Panel Figure 11-10: RCCM Assembly Figure 11-11: Control Manifold Assembly Figure 12-1: Wiring diagram remote indication box ( RCS1) Figure 12-3: Wiring Diagram Rear, Cabinet, Interlock Figure 12-4: Wiring Diagram Front Panel Drawer Figure 12-5 thru 13: CDO 863 Schematic Figure thru 18: CDO 863 Electrical Drawer Component Wiring Figure 12-19: CDO 863 Lower Electrical Drawer Component Wiring Figure 12-20: CDO 863 Tank Component Wiring XX CDO 863 LRA, IO&M manual TOC-vii

9 Table of Contents List of Tables Table 3-1: CDO electrical requirements Table 3-2: CDO process inlet parameters Table 3-3: CDO exhaust requirements Table 3-4: CDO customer connections Table 3-5: CDO dimensions Table 3-6: Gas Supply Requirements Table 3-7: CDO Water supply and drainage requirements Table 3-8: Water quality limits Table 3-9: CDO 863 weight Table 3-10: CDO 863 thermal properties Table 3-11: CDO 863 power load distribution Table 4-1: Pipe drain calculation for 1/2-inch PVC drain line Table 4-2: Pipe drain calculation for 1-inch PVC drain line Table 5-1: Pre-start-up verification checklist Table 5-2: CDO 863 tank plumbing description Table 5-3: Valve settings and operations Table 5-4: CDO front panel components Table 5-5: CDO start-up check sheet Table 6-1: CDO interlock/sensor operational status Table 8-1: Preventive maintenance Table 8-2: Electrical torque specifications Table 9-1: Operations page parameter record Table 9-2: Custom main page parameter record Table 9-3: Setup page parameter record Table 11-1: Exploded View Parts Table 11-2: 863 Secondary Scrubbing Plumbing Table 11-3: Tank Plumbing Parts Table 11-4: Pneumatic Chamber Drawer Table 11-5: Preheater Steam Reagent Assembly Table 11-6: Control Chamber Assembly Drawer Table 11-7: Control Panel Assembly Drawer Table 11-8: CDO Tank Electrical Enclosure Table 11-9: Cabinet Assembly Parts Table 11-10: Front Panel Table 11-11: RCCM Assembly - Parts Table 11-12: Control Manifold Assembly TOC-viii CDO 863 LRA, IO&M manual XX

10 CDO 863 Instalation, Operation, and Maintenance Manual 1.1 Safety notices and terms Safety Chapter 1 Review this manual carefully. Always follow approved safety procedures, including the use of lockout/tagout devices, proper clothing, and eye and face protection. Pay particular attention to warnings and precautions in this manual. The following is an example of warnings used in this manual (Please read carefully instructions anywhere a Warning or Danger is used in the manual): DANGER! Warns about hazards that will cause serious personnel injury, death or major property damage if ignored. WARNING! The warning notice identifies potentially dangerous situations, where improper actions could cause death or serious injury to personnel, or major property damage. CAUTION! The Caution notice is a general hazard which identifies situations where improper actions could cause damage to the equipment or product. te Indicates special instructions that are important but not related to hazards XX CDO 863 LRA, IO&M manual 1-1

11 Safety CDO safety section 1.2 CDO safety section This safety section is designed to notify the end user of the CDO equipment that some physical and/or chemical hazards may exist in the operation and maintenance of the CDO. The physical hazards are related to the servicing of the CDO while the chemical hazards are related to the process gases and their by-products, which are abated by the CDO. Air pollution regulations, employee health concerns, and growing awareness of toxic agents from manufacturing, demand increased improvements in process exhaust gas conditioning. Controlled Decomposition/Oxidation (CDO ) reduces hazards associated with flammable, toxic, or corrosive gases, and vapors. CDO systems provide controlled decomposition and/or oxidation of process exhaust gas(es). As with any processing system, malfunction and failure can occur due to unforeseen or uncontrollable circumstances. ATMI Corporation, its officers, managers, engineers, and representatives cannot be held responsible for such failure nor for the customer's negligence or misuse of this equipment. At the very least, follow procedures and recommendations outlined in this document for proper system functioning. 1.3 End user responsibilities Use only the most current revision of this manual. See the revision date in the control box footer. The information in ATMI Corporation's published engineering specifications, manuals, and guides are correct as of publication date. ATMI Corporation is not responsible for product application, including but not limited to compatibility with other equipment. The end user and their subcontractors must be responsible to assure that their respective employees receive hazardous communication training which meet or exceed OSHA 29CFR (hazardous waste operations and emergence response). End users and their subcontractors who work on the CDO are required to assure that their respective employees are provided with material safety data sheets from their Environmental Health and Safety (EHS) department for all gases and/or chemicals which pass through or are treated by the CDO. During maintenance of the CDO exposure to corrosive, flammable, combustible and/or toxic substances could occur. Therefore, personal protective equipment in the form of impervious clothing, gloves, and face shields (eight-inch minimum), should be worn to prevent any possibility of skin contact. 1-2 CDO 863 LRA, IO&M manual XX

12 Safety End user responsibilities Proper ventilation for the CDO and the work area must be maintained to reduce a health or fire hazard. If exposure to clothing occurs remove contaminated clothing immediately and place contaminated clothing in closed containers pending disposal or cleaning. Splash-proof safety goggles are required if there is any possibility of eye contact with any of the above substances. Emergency eyewash fountains should be provided in the immediate work place. It is imperative that each end user follows the policy and procedure set up by their Environmental Health and Safety Department. During preventative maintenance or any other form of maintenance on the CDO, personnel must be made aware of the potential hazards associated with the CDO (see Figure 8-1, Operation and maintenance pictorial hazards for the hazard areas on the CDO. This figure must be consulted prior to maintenance functions to alert the service technician of potential hazards. These labels include, but are not limited to: high voltage areas (electronics/electrical cabinet, heater element connection), hot surfaces (body tube), and hazardous chemicals (recirculation/sump, tank, and slope drain). An additional potential hazard exists in the cleaning of the CDO and any lines to and from the CDO. In many cases the particulate formed may be or may contain a hazardous substance. Such substances must then be considered hazardous waste and treated as such. In the likely event that these substances are being vacuumed out of the CDO or lines to and/or from the CDO, the proper equipment for vacuuming such substances must be utilized. Proper handling procedures defined by the end users Environmental Health and Safety Department and must be adhered to by servicing technicians. Refer to Appendix B for a partial listing of potential gases used and their by-products that may collect in the CDO. Safety related fault circuits and interlock connections as well as the EMO are listed and described in the CDO Interlock/Sensor Operational Status section of this manual. Related electrical schematics are in the Electrical section. It is imperative that these sections be read and understood by any end user or their subcontractor service technician prior to servicing the CDO. It is most important that the CDO is installed according to the CDO manual, the recommendations of the process tool manufacturer, the pump manufacturer, and all federal, state and local codes and regulations. Connection of the interlock between the CDO and process tool is essential for the continued operating safety of personnel and equipment. Placement of any additional labels required by local or state agencies must be done during installation of the CDO XX CDO 863 LRA, IO&M manual 1-3

13 Safety Lockout and tag-out procedure During inspection of the CDO fault, interlock and EMO systems, testing and inspection of any end user inputs should be made. This includes, but is not limited to, gas detection systems, end point detection, exhaust control systems, exhaust line heat tracing and exhaust line valving. It is imperative that when working on any piece of equipment, the service technician follow all policies, practices and procedures established by the end users' Environmental Health and Safety group. 1.4 Lockout and tag-out procedure ATMI requires Lockout/Tag-out to be performed before working on a specific piece of equipment. The equipment must be locked and tagged out of all the energy sources before beginning work. Each Factory on site may have additional controls. Follow specific Factory policies when performing Lockout/Tag-out of the CDO. Absolutely no Group or Custodial locks will be used. Group and Custodial locks infer one (1) lock representing all employees working on that particular tool or system. 1.5 Energized electrical hot work type definitions Type 1 - Equipment is fully de-energized (electrically cold ) Type 2 - Equipment is energized. Energized circuits are covered or insulated. Type 2 work includes tasks where the energized circuits are or can be measured by placing probes through suitable openings in the covers or insulators. Type 3 - Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or 240 volt-amps in dry locations. Type 4 - Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are greater than 30 volts rms, 42.4 volts peak, 60 volts dc, or 240 volt-amps in dry locations. The following is a list of Type 3, 4, or 5 Electrical Procedures that are found in this CDO Installation, Operation, and Maintenance Manual: Section 9.5, "Conductivity liquid level sensor" This is a type 3 Electrical Procedure. 1-4 CDO 863 LRA, IO&M manual XX

14 Safety Energized electrical hot work type definitions Section 9.7, "Solid state relay (CZR)". This is a type 4 Electrical Procedure. Section 9.9, "Solenoid valves". This is a Type 3 Electrical Procedure Section 9.12, "Thermocouple". This is a Type 3 Electrical Procedure Section 9.13, "Temperature controller". This is a Type 4 Electrical Procedure Section 9.16, "Recirculation pump". This is a Type 4 Electrical Procedure Section 9.17, "Sump pump". This is a Type 4 Electrical Procedure XX CDO 863 LRA, IO&M manual 1-5

15 Safety Energized electrical hot work type definitions 1-6 CDO 863 LRA, IO&M manual XX

16 CDO 863 Instalation, Operation, and Maintenance Manual 2.1 Introduction Theory of operation Chapter 2 Environmental regulations, and a growing awareness of the effects of toxic agents used or created in manufacturing, demand point of use process exhaust gas conditioning. Controlled Decomposition/Oxidation (CDO ) reduces hazards associated with flammable, toxic, or corrosive gases. Figure 2-1, CDO Cut-Away displays the path of gases through the CDO. Process exhaust gases and sleeve nitrogen enters the CDO at the inlet section. The CDO is available with 1-4 independent inlet nozzles, allowing the connection of up to 4 process chambers, process tools, or vacuum pumps to the CDO, not to exceed a total of 200 slm for all inlets or 100 slm at any one inlet. The Oxygenator Section is designed so that mixing of noncompatible process gases and CDA takes place downstream of the inlet section, in the Thermal Reaction Section XX CDO 863 LRA, IO&M manual 2-1

17 Theory of operation Introduction The Thermal Reaction Section features a cylindrical liner contained within a resistive heating element. The liner absorbs thermal energy from the heater element to become a hot wall type reaction chamber. The Control Thermocouple monitors the Thermal Reaction Section temperature. The Temperature Controller maintains the proper pre-set temperature at the Thermal Reaction Chamber to facilitate the reaction of process gases in a contained and controlled manner. The typical CDO temperature setting is 850 C. This temperature setting will enable the abatement of most process effluents. However in some instances, when the process gases are in low concentrations, or there are significant inert gas flows, ie as a result of pump purges diluting the process gas stream, the CDO may not achieve the optimal level of abatement. Improved DRE may be obtainable by reducing the inert gas flows, and adjusting the CDO temperature set point to C. Initial scrubbing of soluble gases and particulate removal occurs in the Primary Cooling/Scrubbing Section, and is accomplished via constant water spray. Process gases are cooled to below 50 C in this section. The Secondary Liquid Cooling/Scrubbing Section removes additional water soluble gases and fine particulate by employing a counter-current water spray over a packed bed media. Gases then pass through the Dual Scrub section, which reduces entrained moisture, residual particulate, and trace acids in the gas stream. Recirculation of cooling/scrubbing liquid for the purpose of reducing fresh water consumption is utilized in the CDO. A shellin-tube heat exchanger utilizes chilled water to ensure low recirculation liquid temperature. The cooling/scrubbing liquid drains to the recirculation tank through an internal negative slope/vapor barrier drain to prevent venting of process gases into the tank. The Sump tank allows waste cooling/scrubbing liquid to collect and be pumped to a remote drain. Liquid level switches automatically control the pumping cycle. Liquid Reagent Addition (LRA) is an option for treatment of process gas(es) that are enhanced by gaseous reagent chemistry. DI water is vaporized and mixed with inlet CDA prior to being introduced to the CDO reaction chamber. 2-2 CDO 863 LRA, IO&M manual XX

18 Theory of operation Introduction Figure 2-1: CDO Cut-Away XX CDO 863 LRA, IO&M manual 2-3

19 Theory of operation Introduction 2-4 CDO 863 LRA, IO&M manual XX

20 CDO 863 Instalation, Operation, and Maintenance Manual Facilities requirements Chapter 3 This chapter describes the proper CDO location and environment, surrounding clearances, facilities locations and specifications. 3.1 Site location requirements Locate the CDO in an area that is: Well-illuminated Well-ventilated Easily accessible to maintenance personnel Situated so that dust and/or particulate that may escape during maintenance will not contaminate other areas or equipment Environment Clearance The optimal CDO environment should be maintained at a temperature of 25 C (±5 C), and a relative humidity of <70%. Proper clearance surrounding the CDO must be provided to allow adequate access for maintenance XX CDO 863 LRA, IO&M manual 3-1

21 Facilities requirements Site location requirements ADDITIONAL RECOMMENDED CLEARANCE FOR MAINTENANCE 24.00[60.96] C 12.00[30.48] 24.00[60.96] 12.00[30.48] D 24.00[60.96] MINIMUM RECOMMENDED CLEARANCE E B CLEARANCE REQUIRED FOR: B E A ELECTRICAL ACCESS, FRONT PANEL SWING 24.00[60.96] ELECTRICAL DRAWER A FRONT 12.00[30.48] 24.00[60.96] 36.00[91.44] BACK VIEW B C D E SIDE PANEL ACCESS CABLES AND UTILITY CONNECTOR CLEARANCE CDO TM INLET, EXHAUST WATER DRAIN, PLUMBING DIMENSIONS ARE IN INCHES. [mm] 12" RECOMMENDED MINIMUM WORKING SPACE Figure 3-1: CDO clearance Facilities requirements Table 3-1 through Table 3-7 list the facilities requirements for the CDO, and are referenced to "Figure 3-2: Facilities view" on page 3-3 and "Figure 3-3: CDO facilities locations and dimensions" on page 3-4. Table 3-1: CDO electrical requirements Item Description Voltage Frequency Operational parameters A Power required 208/220 VAC (110 VAC; 110 VAC; neutral; ground) 50/60 Hz 50 Amp, single- phase, 4- wire Table 3-2: CDO process inlet parameters Item Description Configuration Connection Operational Parameters B Process Inlet Multi (4) port KF /2" (38mm) 100 slm[3.5 cfm] maximum per inlet (not to exceed 200 slm [7.06 cfm] total input flow) 3-2 CDO 863 LRA, IO&M manual XX

22 2 2 Facilities requirements Site location requirements S MADE IN USA L DI H 2 O CDO STATUS (3 PIN) INTERLOCK (4 PIN) LIFE SAFETY (2 PIN) STATUS LED (6 PIN) MINIMUM PRESSURE: N :70 PSI (483kPa) CDA:80 PSI (552kPa) MAXIMUM PRESSURE: N :100 PSI (670 kpa) CDA:100 PSI (670 kpa) H E E G F F F F K I 220 VAC 50 AMP 60 Hz A J Figure 3-2: Facilities view Table 3-3: CDO exhaust requirements Item Description Configuration Connection Operational Parameters D Cabinet Stainless or FRP 6" [152 mm] metal duct 2,400 slm [85 cfm] minimum Exhaust C CDO Process 4" Halar coated SS ISO 4" [100mm] 5" to 0.5" [122 mm to 13.6 Exhaust 316L or PVDF mm] W.C; 566 slm [20 cfm] maximum Table 3-4: CDO customer connections Item Description Configuration Connection Operational Parameters E System Status (2); J9 Connector Provided 3-pin mic jack: 2 (two) sets of dry contacts per connector. Pin 1 (N.O.), 2 (N.C.), 3(COM) 24 VAC F Interlock (4); J10, J15, J16, J17 G Remote Indication J8 Connector Provided Connector Provided H Life Safety Connector Provided I Remote Light Indication 4-pin mic jack; 4 (four) sets of dry contacts per connector. Pin 1(N.O.), Pin 3 (COM) 37-pin Amphenol connector, 100-ft. cable 2-pin mic jack; 1 (one) set of dry contacts N.C pin mic jack; 1 (one) set of dry contacts. 24 VAC VAC 24 VAC XX CDO 863 LRA, IO&M manual 3-3

23 Facilities requirements Site location requirements CABINET EXHAUST 1 FACILITIES VIEW C B 14 D Q M 9 2 R P N LEFT SIDE VIEW TOP VIEW Figure 3-3: CDO facilities locations and dimensions Table 3-5: CDO dimensions Item Dimension Item Dimension Item Dimension 1 2 (5.08cm) (48cm) (26cm) (32cm) (147cm) (38cm) 3 3 (8cm) (104cm) (45cm) (30cm) (122cm) (49cm) (23cm) (104cm) (62cm) (14cm) (76cm) (81cm) (20cm) (38cm) (30cm) (19cm) 3-4 CDO 863 LRA, IO&M manual XX

24 Facilities requirements Site location requirements Table 3-6: Gas supply requirements Item Description Pressure Connection Operational Parameters J Clean Dry Air (CDA) 90 ± 10 psi [465 ± 52 cm Hg] 1/2" Stainless Compression Constant, Regulated 300 slm [10.5 cfm] system flow requirement. Relative humidity <10%. Customer must install a regulator, pressure gauge, and point of use shut off valve. K Nitrogen, House 85 ± 15 psi [440 ± 78 cm Hg] 3/8" NPTF Stainless Compression, Constant, Regulated, Filtered to 5µ. 100 slm [3.5 cfm] system flow requirement. Customer must install a regulator, pressure gauge, and point of use shut off valve. Table 3-7: CDO Water supply and drainage requirements Item Description Pressure Connection Operational Parameters L Deionized Water Reagent 15 to 20 psi [78 ± 10 cm Hg] 1/4" Stainless Compression, Regulated 5 ml per min. system flow requirement. 50 kω deionized water. Customer must supply a regulator with pressure gauge. M N P Water fresh <100 mg/liter of Hardness. Cooling Water Return Cooling Water Supply 45 ± 10 psi [233 ± 52 cm Hg] 40 ± 20 psi [207 ± 103 cm Hg] Q Drain, IW max 30 psi [155 cm Hg] R S Drain, Drip tray Serial # plate 1/2" FNPT Constant, Regulated Filtered to 100µ 0.33 gpm [1.25 lpm] minimum. Customer must install a regulator, pressure gauge, point of use shutoff valve, and 100µ filter. 1" FNPT Customer must install flowmeter and point of use check valve. 1" FNPT 5 gpm [19 50 F ± 5 F [10 C ± 3 C]. Customer must install a pressure gauge, and point-of-use shut off valve. 1/2" FNPT Refer to section for sizing the plumbing. Intermittent flow. Customer must install a check valve in plumbing within 6 of CDO. Gravity 1" FNPT XX CDO 863 LRA, IO&M manual 3-5

25 Facilities requirements Site location requirements Table 3-8: Water quality limits Parameter Limit Units Ammonia (NH 4 +) 5 mg/l Phosphate (PO4 3- ) 15 mg/l Calcium (Ca2+ ) 5 mg/l Magnesium (Mg2+ ) 5 mg/l Barium (Ba) <1 mg/l Boron (B) 10 mg/l Iron (Fe) 5 mg/l Manganese (Mn) 5 mg/l Silica, Total 10 mg/l Total Dissolved Solids (TDS) mg/l ph (25 C) 6-8 Alkalinity (as CaCO3) no limit mg/l Total Hardness (as CaCO3) 20 mg/l Table 3-9: CDO 863 weight Wet 375 Kg 273 Kg 830 lbs. 602 lbs. Dry Table 3-10: CDO 863 thermal properties Media Max. BTUs/Hour Flow Change in Temp. Cabinet exhaust cfm [3114 slm] 10 F [-12 C] City water to drain 4, gpm [1 lpm] 30 F [-1 C] CDO exhaust 4, cfm [566 slm] 30 F [-1 C] Electrical drawer cfm [991 slm] 20 F [-7 C] Chilled water 11,200 5 gpm [19 lpm] 5 F [-15 C] * Table 3-10 lists the heat generation properties of the CDO in normal operation. Table 3-11: CDO 863 power load distribution. Component Voltage Max power Max Current Duty cycle Control circuit 28 VAC 80 W 2.9 A Continuous Recirculation pump 208/220 VAC 560 W 6.5 A Continuous Sump pump 208/220 VAC 560 W 6.5 A On demand Heater element 208/220 VAC 5500 W 25 A PID controlled Water Vaporizer 208/220 VAC 1200 W PID controlled 3-6 CDO 863 LRA, IO&M manual XX

26 CDO 863 Instalation, Operation, and Maintenance Manual 4.1 Introduction 4.2 Receipt and unpacking Installation Chapter 4 Air pollution regulations, employee health concerns, and growing awareness of toxic agents from manufacturing, demand increased improvements in process exhaust gas conditioning. The Controlled Decomposition/Oxidation (CDO) reduces hazards associated with flammable, toxic, or corrosive gases, and vapors. CDO systems provide controlled decomposition and/or oxidation of process exhaust gas(es). As with any processing system, malfunction and failure can occur due to unforeseen or uncontrollable circumstances. ATMI Corporation, its officers, managers, engineers, and representatives cannot be held responsible for such failure nor for the customer's negligence or misuse of this equipment. At the very least, follow procedures and recommendations outlined in this document for proper system functioning. CDO systems and parts may be shipped in one or more containers. Each packing slip indicates the number of crates. Report any signs of rough handling or damage during shipment to the transportation carrier. Inspect the CDO when un-crating to ensure that shock and trip indicators have not been tripped during shipment. Inspect all equipment and/or parts after removal from shipping containers. Prior to installation ensure that flanges and fittings are tight, electrical components are properly seated, and all plastic wrap and shipping materials are removed. te Report any broken, damaged, or missing parts immediately to ATMI Corp., Central Services, at (888) or Internationally at (707) XX CDO 863 LRA, IO&M manual 4-1

27 Installation Installation procedure 4.3 Installation procedure Location When installing the CDO, ensure that seismic tie downs are utilized or other bracing is in place to prevent excessive movement during seismic events. Position the CDO as close as possible to the process exhaust gas source (process tool vacuum pump). See Figure 3-1 CDO clearance. Long pump exhaust lines will, depending on the gas species, produce a more frequent maintenance cycle on the pump exhaust lines. Some processes will require heated pump exhaust lines to reduce unwanted condensation prior to the CDO. Cool ambient air conditions can also lead to process gas condensation in the vacuum pump exhaust line, and in some cases these lines may require heating Fixed mounting The ATMI CDO 863 meets the requirements of SEMI S2-93. anchorage was specified for the sump pan in which the pump unit is mounted. Without such restraint, the ATMI CDO 863 can slide during an earthquake but is not expected to overturn per the requirements of SEMI S2-93. If sliding is to be prevented, the restraint system should be capable of resisting a total lateral force of 500 pounds To meet UBC requirements the following Fixed mounting Assembly must be installed: 1. Provide corner brackets at all corners of the pump unit. te that in this configuration, only one bolt is necessary to connect the bracket to the sump pan. 2. Provide a positive means of attachment between the corner brackets and the pump unit capable of carrying an uplift force of 200 pounds and a sheer force of 235 pounds. Bolts, screws, or structural adhesives are acceptable means of providing positive attachment of the corner bracket to the pump unit. 4-2 CDO 863 LRA, IO&M manual XX

28 Installation Installation procedure Figure 4-1: Fixed mounting assembly XX CDO 863 LRA, IO&M manual 4-3

29 Installation Installation procedure 3. Provide the same anchorage for the sump pan as used for the pump unit to fasten the ATMI 863 CDO to the floor. This is necessary to prevent overturning of the unit for the higher UBC loading condition. This anchorage is not necessary if the bolts' connecting the corner brackets on the pump unit penetrates the sump pan and is tied to the floor or other structural member Location of the ATMI 863 CDO should consider a maximum floor-bearing load of 1,200 pounds under seismic loading conditions Connecting the CDO CAUTION! Proper installation of the CDO is absolutely essential! The following steps (steps ) reference items 2-24 in Figure 4-2, Typical CDO installation Connect the process tool (#2, Figure 4-2) or source of exhaust gas(es) to the CDO with gas-tight, 316L stainless steel pipe with welded, gas-tight connections. Ensure that connections are properly aligned with CDO inlets and are stress free. To prevent unwanted premature particulate formation, eliminate the introduction of oxygen and moisture in the process gas stream prior to the CDO by ensuring that all lines are leak tight. A Helium leak check of all piping, welds, fittings, and connections is required prior to operation and after any line maintenance, to ensure line integrity. Prior to connecting any external lines to the unit ensure that they have been purged and are free of foreign material. WARNING! If piping is not gas-tight, gases may leak into the room, or air may leak into the piping, mix with the gas stream, and cause a reaction prior to the CDO. Purge any dead space in the line with 5 slm of nitrogen, including any places where the line could be broken for maintenance. 4-4 CDO 863 LRA, IO&M manual XX

30 Installation Installation procedure Figure 4-2: Typical CDO installation XX CDO 863 LRA, IO&M manual 4-5

31 Installation Installation procedure Maximum flow into the CDO must not exceed 200 slm, including all pump purges and process flows. The max flow capacity for an individual inlet is 100 slm. Therefore, a system using four inlets may have various amounts of gas flow per inlet, but no more than 100 slm in any one inlet and no more than 200 slm total going into the CDO. As gas flow into the CDO inlet is increased, the pressure differential ( P) across the system increases. This can be seen by comparing the inlet and exhaust Magnahelics. Examples of pressure differential per inlet are as follows: 65 slm (142 scfh) = P 0.25" of W.C. 100 slm (218 scfh) = P 0.50" of W.C. (The 200 slm (437 scfh) total flow limitation is due to the thermal capabilities of the CDO heater element.) 1. Excessive flows of inert gases will adversely effect the efficiency and performance of the CDO. Inert gas flow rates into the process gas stream such as vacuum fore line purges, vacuum pump purges, exhaust line dead space purges, or failed regulators and valves, should be monitored via customer installed flow meters. 2. The vacuum pump exhaust line to the CDO must be as short as possible with a minimum of connections and bends. Avoid the use of flexible type bellows connections as they create turbulence, are prone to leaks, and are often not made of a corrosion resistant material. Isolation valves should be installed to allow service of forelines. 3. Avoid abrupt pressure changes at the CDO inlet. Sudden gas velocity changes or pressure fluctuations can, with some processes result in unwanted condensation in the exhaust line prior to the CDO. 4. Use the appropriate, process specific O-ring material for all piping connections. All pump exhaust line connection O-rings and seals should be replaced at regular intervals, and during any exhaust line breach. Limit the number of connections to reduce the chance of leaks and possible clogging of the exhaust line prior to the CDO. 4-6 CDO 863 LRA, IO&M manual XX

32 Installation Installation procedure A nitrogen purged Magnehelic gauge (#3, Figure 4-2) is connected to the Oxygenator Section to monitor the pressure at the inlet of the CDO. Excessive gas flow will produce an inlet over pressure alarm. Avoid abrupt positive pressure changes such as viscous gas flows created by chamber evacuation from atmosphere. The inlet pressure alarm circuit comes standard with a 5-second delay to prevent transient pressure events from causing over pressure alarms. This circuit monitors for any obstructions in the flow going through the CDO. The high and low pressure alarm settings are preset at 0.5" W.C. and 10 W.C If purchased, install the flame check canister(s) (#4, Figure 4-2) in the line before the CDO inlet Inlet connections (#5, Figure 4-2) must be gas tight 316L stainless steel. All connections must be leak tight CDO gaseous exhaust fitting (#6 in Figure 4-2) is a 4" (100mm) ISO type clamp connection. (See Item D, Table 3-3) BEND WITHOUT KINKING HOSE TIE WRAP WITH ADHESIVE BACK MIN. 3" ELEVATION SPRAY NOZZLE PORT EXHAUST MOISTURE CONTROL PORT CABINET WALL TO EXHAUST MAGNEHELIC TO N 2 PURGE SYSTEM Figure 4-3: Exhaust pressure plumbing XX CDO 863 LRA, IO&M manual 4-7

33 Installation Installation procedure The facilities exhaust line fitting (#7, Figure 4-2) must be a 4"(100mm) ISO type clamp connection and is to be connected to the house acid exhaust with a 4" diameter line. Stainless steel (316L) piping with acid resistant coating (such as Halar) or PVDF piping should be used for all exhaust lines. Ensure that the connection is properly aligned with the exhaust connector (#6, Figure 4-2) and is stress free. 1. Avoid restrictions in the exhaust line unless restriction is required to control the prescribed draw, or to provide isolation during maintenance. (See Item D, Table 3-3) Excessive draw or erratic changes within the exhaust duct can adversely affect the performance of the CDO. Provide a negative slope in the exhaust line (see Figure 4-3) from the house exhaust header back to the CDO to minimize the collection of condensation in the facility acid exhaust ducting. Avoid the use of flexible lines. 2. If a sampling port is to be installed in the process exhaust line, the sample port must be located (six to ten duct diameters for a standard 4-inch exhaust) downstream of the CDO exhaust to allow for adequate pressure equalization and gas mixing. (Reference Figure 4-4) A nitrogen purged Magnehelic pressure gauge (#8, Figure 4-2) is connected to the CDO gaseous exhaust line to monitor exhaust line pressure (exhaust draw) downstream of the CDO The recommended CDO cabinet exhaust line (#9, Figure 4-2) is 6 diameter stainless steel or FRP material, suitable for cabinet exhaust. If a cabinet exhaust sensor is installed, a 3/8 W X 2 3/8 H slot should be cut in the cabinet exhaust ducting to avoid restricting it's movement. Cabinet exhaust draw must be at least 85 cfm. The CDO process exhaust gas, and cabinet exhaust must remain separated all the way to the facilities exhaust main header connection. Do not connect the CDO process exhaust gas outlet to the CDO cabinet exhaust. 4-8 CDO 863 LRA, IO&M manual XX

34 Installation Installation procedure 1. If a sampling port is to be installed in the cabinet exhaust line, it must be located after a 36 to 60 straight run downstream of the CDO exhaust in the facility acid exhaust ducting (see Figure 4-4). te: If a scrubbed House Exhaust Header is not available. The CDO exhaust and cabinet exhaust must be run independently to a scrubbed acid exhaust header. te: The point of entry at the header(s) needs to be at or above the centerline. Minimum 1/8" per ft slope back to CDO Minimum 16" prior to bend 6" between ports Sample Exhaust Port Sample Port Sample Port 24" - 40" from Gaseous Exhaust TM CDO Exhaust Process Inlets Cabinet Exhaust Figure 4-4: Port locations CDO Interlock circuitry is capable of handling 2A at 24V. The interlock connector is wired to the CDO controls (#10, Figure 4-2) to provide a switch closure when the system is operable. Refer to Chapter 6 for detailed information The System Status Indicator (#11, Figure 4-2) has a common set of normally open and normally closed contacts. Contacts change when ANY fault occurs. Pins 1 (N.O.), 2 (N.C.), and 3 (COM.) of a 3-pin Mic-jack connector are utilized. CDO System Status Indicator(s) circuitry is capable of handling 2A at 24V XX CDO 863 LRA, IO&M manual 4-9

35 Installation Installation procedure The CDO nitrogen (cabinet connection #13 in Figure 4-2) pressure requirement from the facility is a constant 70-PSI minimum to 100-PSI maximum. The flow requirement is 100 slm. A 3/8 compression fitting provides for facility hook-up. The customer must supply a point of use shut-off valve, pressure regulator, and pressure gauge on the nitrogen inlet line The CDO Clean Dry Air (CDA) (cabinet connection #14 in Figure 4-2) pressure requirement from the facility is a constant 80-PSI min. to 100-PSI max. The flow requirement is 300 slm. A 1/2 compression fitting provides for facility hook-up. The customer must supply a point of use shut-off valve, pressure regulator, and pressure gauge on the clean dry air inlet line Remote indication (cabinet connection #12 in Figure 4-2) is an option available on all CDO systems. A 100-foot interconnect cable with 37 pin connector at each end is included. The cable carries 24 VAC signals. (See Figure 4-5) CDO STATUS SUPPLY N 2 FLOW AIR FLOW DRAIN FLOW H 2 O FLOW IN LET PR ESSU RE SUMP PUMP LIQUID LEVEL RCCM Figure 4-5: Remote indication box 4-10 CDO 863 LRA, IO&M manual XX

36 POWER IN 110 VAC #8 BLK POWER IN 110 VAC #8 BLK POWER IN NETURAL #8 WHT TBI-3 #8 BLK TBI-6 #8 WHT TBI-5 #8 BLK Installation Installation procedure A 208/220 VAC single phase, 50-60Hz, 50 Amp service is required (cabinet connection #15 Figure 4-2). A Ground Fault Interrupt (GFI) circuit is provided with a 5 ma trip level (type of protection: personnel) and connected to the CDO. ATMI recommends the use of a lockable main disconnect switch prior to the CDO. CUSTOMER SUPPLIED POWER LINES TB6 GFI CIRCUIT BREAKER LINE LOAD TO ELECTICAL ENCLOSURE VIA E-CHAIN TO ELECTICAL ENCLOSURE VIA E-CHAIN Figure 4-6: CDO power connections Connect the deionized water reagent supply line (#18, Figure 4-2) to the CDO at 15 to 20 psi, using the 1/4 compression fitting on the back of the CDO cabinet. The customer must supply a regulated deionized source with shut-off valve prior to the CDO. The recommended resistance of the deionized water source is 50 kω. Ultra pure water (UPW) should not be used due to the aggressive nature of UPW on metallic components. Prior to start-up the reagent source should be flushed to remove any particles that could clog the delivery orifice of the reagent delivery system of the CDO XX CDO 863 LRA, IO&M manual 4-11

37 Installation Installation procedure te te If the CDO is to stand idle for any length of time the reagent delivery lines should be flushed prior to start-up to remove any build up that may have occurred. If a sampling port is to be installed, it must be located after a 36" to 60" straight run downstream of the CDO CRA cabinet exhaust in the facility acid exhaust ducting Connect fresh city water (tank connection #19 in Figure 4-2) to the 1/2 female NPT on the recirculation tank. Fresh water is supplied to the water spray nozzles in the Upper and Lower Secondary Cooling/Scrubbing Section. Each CDO is equipped with water flow solenoid valves, water flow sensors/switches, and water flow indicator. The customer must supply a 1/2 line with a 100-micron inlet filter, manual shut-off valve, pressure regulator, and pressure gauge. Water pressure must be 45 PSI min. to 75 PSI max. and it's temperature should be 70 F (21 C) or lower. City water is generally acceptable, however water that contains excessive magnesium, calcium, sulfur, and other contaminants can accumulate and adversely affect water valves and flow sensors. Water hardness should be less than 100 mg/liter. Customers experiencing high mineral content in their non-potable water should consider utilizing reverse osmosis or de-ionized water The chilled water outlet (tank connection #20 in Figure 4-2) has a 1" NPT connection. The customer should supply a point-of-use shut-off valve for the chilled water supply, and a water flow meter for the chilled water return. The pressure change ( P) is 2 psi. The temperature change ( T) is approximately 5 F at 5 gpm The recirculation system includes a heat exchanger. Connect the chilled water supply to the heat exchanger 1" female NPT inlet (tank connection #21 in Figure 4-2). The chilled water should be supplied at 5 gpm 20 psi (minimum) to 60 psi (maximum), and have a temperature of 50 F ±5 F (10 C ±3 C). The customer should supply a point-of-use shutoff valve, pressure regulator, and pressure gauge for the chilled water supply CDO 863 LRA, IO&M manual XX

38 Installation Installation procedure The system includes a drip pan for containment with a 1" NPTF drain connection (tank connection #22 in Figure 4-2) for connection to the facilities drain The wastewater drains to the recirculation tank through a pipe submerged 4" below the water line, thus creating a vapor barrier. The wastewater then overflows into the sump tank, and is periodically pumped to the facility drain (tank connection #23 in Figure 4-2). The addition of a P-trap is unnecessary. The drain connection is 1/2 NPTF. Wastewater will contain CDO reaction by-products and particulate. Particulate generation will be process tool specific and will dictate the preventive maintenance schedule for the sump and recirculation tank. The safety personnel at the installation location must determine handling procedures. The recirculation system can be drained via the pump-out drain connection. The customer must install a check valve in the CDO drain line plumbing within six feet of the CDO to prevent backflow. The following calculation should be performed to ensure that the facilities drain plumbing is of adequate diameter and configuration for the type of sump pump with which the system is equipped. Perform the drain line calculation for 1/2 PVC pipe and compare Total A to the maximum value based on pump size and frequency. If the results are more than the maximum allowable value, recalculate using 1" PVC pipe to determine if this is an available option. Otherwise routing of the drain should be changed. 1. To get 5.0 gpm of flow, Total A or B must be less than: 55 for a M-10 sump running at 60 Hz or 40 for a M-10 sump running at 50 Hz XX CDO 863 LRA, IO&M manual 4-13

39 Installation Installation procedure Table 4-1: Pipe drain calculation for 1/2-inch PVC drain line For a 1/2-inch PVC pipe drain line, perform the following calculations: 1 Elevation in feet from CDO outlet to facility drain header = 2 Number of elbows X 1.3 = 3 Number of check valves X 2.8 = 4 Total feet of all pipe (Horizontal & Vertical) x 0.35 = 5 Pressure at drainage header in feet of Water Column (If in PSI, X by 2.3) = 6 Fittings at tank (always Included) = 7.1 (Add all values from above) Total A (Feet in head) 7 If Total A is less than 55 for 60 Hz power or less than 40 for 50 Hz, use 1/2 plumbing. 8 If Total A is more than 55 for 60 Hz power or more than 40 for 50 Hz, recalculate using Table 4-2:. Table 4-2: Pipe drain calculation for 1-inch PVC drain line For a 1-inch PVC pipe drain line, perform the following calculations: 1 Elevation in feet from CDO outlet to facility drain header = 2 Number of elbows X 0.12 = 3 Number of check valves X 0.3 = 4 Total feet of all pipe (Horizontal & Vertical) x = 5 Pressure at drainage header in feet of Water Column (If in PSI, X by 2.3) = 6 Fittings at tank (always Included) = 7.1 (Add all values from above) Total B (Feet in head) 7 If Total A is less than 55 for 60 Hz power or less than 40 for 50 Hz, use 1 plumbing. 8 If Total A is more than 55 for 60 Hz power or more than 40 for 50 Hz, reconfigure your plumbing CDO 863 LRA, IO&M manual XX

40 Installation Installation procedure 70 M-10 Pump Curves 60 Hz 50 Hz Head (FT) Flow (GPM) Figure 4-7: Flow curves for CDO sump pump TM TO CDO EXHAUST TO FACILITY REMOTE DRAIN TO RECIRCULATION SYSTEM TANK VAPOR RELIEF LINE TO WATER VORTEX TANK ACCESS PORT LIQUID TM FROM CDO DRAIN SUMP OUTLET VAPOR RELIEF TO HEAT EXCHANGER HIGH/HIGH HIGH LIQUID LEVEL SENSORS SWING CHECK VALVE WATER LEVEL RISE/FALL LOW RECIRCULATION PUMP LIQUID LEVEL SENSOR SUMP PUMP RECIRCULATION CHAMBER DRAINAGE CONNECTION RECIRCULATION CHAMBER TO SUMP CHAMBER VALVE (FOR DRAINING RECIRCULATION CHAMBERS) Figure 4-8: CDO pump flow diagram XX CDO 863 LRA, IO&M manual 4-15

41 Installation Installation procedure Figure 4-9: CDO 863 system flow diagram 4-16 CDO 863 LRA, IO&M manual XX

42 CDO 863 Instalation, Operation, and Maintenance Manual 5.1 Start-up procedures Verification checklist CDO start-up Chapter 5 Table 5-1: Pre-start-up verification checklist Item Procedure 1 CDO clearance and location requirements met. 2 Inlet lines connected. 3 Performed leak test for gas-tight line connecting Process Tool System and CDO. 4 Flame Check Canister installed (if used). 5 Exhaust line connected and recommended draw is set. 6 Exhaust ducting is as per recommended utilizing a negative slope. 7 CDO cabinet exhaust is connected with recommended material. 8 CDO cabinet exhaust recommended draw is set. 9 CDO Interlock contacts are connected. Make sure the CDO Interlocks are connected to the process tool. The process tool must be placed into a safe standby condition should the Interlocks open. 10 CDO nitrogen is connected and at 85±15 psi with regulator, gauge, and shut off valve installed. The normally open nitrogen solenoid will be open, and nitrogen will purge the CDO. 11 CDO CDA is connected at 90±10 psi with regulator, gauge, and shut off valve. 12 Reagent water is connected at 15 to 20 psi with regulator, gauge, and shut off valve. 13 CDO power is connected and main circuit breaker and TB1 terminals are tightened to torque specs. Refer to Figure CDO chilled water input line is connected and water is at 40±20 PSI, 10 5 gpm, with flowmeter, regulator, gauge, and shut off valve installed XX CDO 863 LRA, IO&M manual 5-1

43 CDO start-up Start-up procedures Item Procedure 15 CDO chilled outlet line is connected. 16 CDO fresh water line is connected and at 45±10 PSI, 0.33 gpm with regulator, gauge, and shut off valve installed. 17 CDO drain line is connected. 18 Verify power feedthrough connections are properly tightened. Reference Section Inspect all gaskets to verify they are in place in accordance with Figure An external p-trap has NOT been installed. 21 Seismic tie downs or bracing in place (Refer to Section 4.3.2). 22 Required labeling per local code in place. 23 All testing of gas or other detection systems has been completed. 24 Complete Start-up Check Sheet (Table 5-5) Verify valve settings and operations Verify that recirculation and sump pump valves are set in the normal operation configuration. Table 5-2: CDO 863 tank plumbing description Item Description Item Description 1 Recirculation Pump Motor 16 Fresh Water Flow Switch 2 Recirculation Pump Head 17 Vacuum Vapor Relief 3 Y-Strainer 18 Fresh Water to CDO 3A Y-Strainer Filter 4 Heat Exchanger Valve Valve Description 5 Sump Pump Head V1 Recirc Pump Feed from Tank 6 Sump Pump Motor V2 Y-Strainer 7 Recirculation Pump Inlet Filter from Tank V3 Drain Out Valve (Under CDO to Tank) 8 CDO Feed from Recirc. Pump V4 Fresh Water Inlet 9 Cooled Recirc Water Inlet to Tank V5 Sump Pump Feed from Tank 10 Chilled Water In V6 Sump Pump to Drain 11 Chilled Water Out V7 Recirc Pump to Drain 12 Fresh City Water In V8 Recirc Tank to CDO Valve 13 Air Operated Valve (for Fresh H 2 O) V9 Quick Fill Valve (Fresh Water) 14 Sump Pump Inlet from Tank V10 Recirc Tank Pump-out (Middle Tank) 15 Sump Pump to Drain V11 Recirc Tank Pump-out (Front Tank) 5-2 CDO 863 LRA, IO&M manual XX

44 CDO start-up Start-up procedures SUMP OUT V6 FROM CDO BASE V5 17 VENT LINE TO TANK V SUMP IN OUT TO ACID DRAIN 9 WATER INLET TO TANK 3 V7 3A EXPLODED VIEW OF Y-STRAINER V10 V11 RECIRCULATION AND RETURN TANK CLEAN SUMP PUMP 18 V V1 RECIRCULATION WATER 2 RECIRC PUMP 13 H 2O FLOW METER 1 V4 12 CITY WATER IN Figure 5-1: CDO 863 tank plumbing Table 5-3: Valve settings and operations. Valve Recirc/sump normal operation Recirc. Pump Out Drain Sump Pump Out Drain V1 Open Open V2 Open Closed V3 Closed Closed V4 Open Closed Closed V5 Open Open Open V6 Open Open Open V7 Closed Open Closed V8 Factory Set Factory Set Factory Set V9 Closed Closed Closed V10 Closed Open Closed V11 Closed Open Closed XX CDO 863 LRA, IO&M manual 5-3

45 CDO start-up Start-up procedures 11 CDO STATUS SUPPLY N 2 FLOW AIR FLOW TEST DRAIN FLOW MAIN BREAKER H 2 O FLOW N 2 INLET PRESSURE SUMP PUMP FAULT RESET LIQUID LEVEL RCCM LPM AIR WATLOW LPM AIR 6 ALARM PUSH TO STOP TWIST OR PULL TO RELEASE 7 AIR SOURCE ON COOL DOWN OFF 14 Figure 5-2: Front Panel Table 5-4: CDO front panel components Item Description Item Description 1 LED Board Assembly 8 On Switch Assembly - Green 2 LED Fault Reset Switch 9 Auto-Restart Switch 3 Alarm Silence Switch 10 Off Switch Assembly - White 4 Temperature Controller 11 Main Power Breaker (GFI) 5 Body tube Heater Circuit Breaker 12 Nitrogen Rotometer 6 Alarm 13 Air Rotometer 7 Emergency Power Off (EPO) 14 LED indicator (Cool Down) 5-4 CDO 863 LRA, IO&M manual XX

46 Recirculation System Y-Strainer Clean-up 1. Turn Pumps Off 2. Close V1 and V2 Valves 3. Clean and/or replace 3A Strainer 4. Open V2 and V1 Valve Initial start-up CDO start-up Start-up procedures Switch on the Main Power Breaker (#11) and the 30 Amp breakers (#5) on the front panel. (See Figure 4-9, CDO 863 system flow diagram ) Open the electrical drawer and turn on the 2 Amp breaker, and the 15 Amp recirculation/sump breaker(s). The white Off Switch (#10) will illuminate. The Temperature Controller displays the set point (#4) and the temperature of the reaction chamber. (See Table 5-4) CAUTION! On initial start-up, do not energize the 15 Amp breaker(s) until the tank is filled Fill the recirculation tank with fresh water by opening valve V9 and fill the recirculation sections until water overflows into the sump section. (See Table 5-4). Figure 4-8, CDO pump flow diagram depicts tank flow. Close V9 once recirculation tank is full. Ensure 15 Amp breaker(s) are energized. CAUTION! Ensure that the sump switch, located on the tank electrical enclosure, is in the AUTO position. This switch is turned to the MANUAL position only if the tank is being drained out Press the green On Switch (#8) to start the CDO. Press Alarm Silence (#3) then Fault Reset (#2) The sump pump will turn on and the alarm will sound. Press Alarm Silence (#3) then Fault Reset (#2). At this point the sump pump will turn off and the recirculation pump will turn on. After three seconds the alarm will sound again. Press Alarm Silence XX CDO 863 LRA, IO&M manual 5-5

47 CDO start-up Start-up procedures. CAUTION! The sump pump will run until Fault Reset is pressed. If the pump breaker was not activated, rising liquid level will cause an alarm condition and shut off the CDO make-up water supply For convenient automatic restart of the CDO after power loss, press the Auto Restart Switch (#9) on the front panel. A light within the switch will illuminate. If activated, the CDO automatically restarts when power resumes Set the CDO Temperature Controller (#4) to 850 C by pressing the Up Arrow < > or Down Arrow < > keys until the lower display reads 850 C. te The typical CDO temperature setting is 850 C. This temperature setting will enable the abatement of most process effluents. However in some instances, when the process gases are in low concentrations, or there are significant inert gas flows, ie as a result of pump purges diluting the process gas stream, the CDO may not achieve the optimal level of abatement. Improved DRE may be obtainable by reducing the inert gas flows, and adjusting the CDO temperature set point to C Open the N 2 Rotometer and Air Rotometer valves at least one full turn.. te 1. Flow will not be indicated on the Air Rotometer (#13) until the CDO reaches 650 C. The Air Flow indicator light (#1) will remain unlit until the CDO reaches 650 C. The chemistry performed in the CDO strongly depends on the reactor temperature. Air is not introduced into the reactor chamber until the system reaches 650 C to ensure that no reaction takes place. If the system does not reach 650 C prior to adding process gases, these gases can pass through the CDO untreated. 2. Flow will be indicated on the N 2 Rotometer (#12), and the Supply N 2 Flow indicator light (#1) will be green; however, the Sleeve N 2 Flow indicator light (#1) will remain unlit until the CDO reaches 650 C. 5-6 CDO 863 LRA, IO&M manual XX

48 CDO start-up Start-up procedures 3. Recirculation water (located behind window in front door) will be flowing at approximately 4.1 gpm. 4. Fresh water (flowmeter located in the tank) will be flowing at approximately 1.2 lpm (0.3 gpm) The CDO reaches 650 C after about 20 minutes, at which time a nitrogen solenoid closes. Adjust the N 2 Rotometer (#12) to flow between 20 and 30 slm Adjust the Air (#13) Rotometer to the value appropriate for the gas(es) being processed. The minimum Air Rotometer setting is 25 slm When the CDO Operational Status indicator light (#1) is green, the CDO is ready to receive gas(es) from the process tool. Both the Interlock and System Status contacts will be closed Indicator lights in the LED Board Assembly (#1) reflect sensor operational status. If an operational failure occurs, corresponding red indicator light(s) illuminate and an alarm sounds. Press the alarm silence (#3). A yellow light indicates a failure has occurred and fault has cleared. Once the failure is fixed, press the LED Fault Reset Switch (#2) to reset the indicator lights In the event of an emergency, pressing the Emergency Power Off (EPO) button (#7) will remove 24 VAC to the Main Contactor, removing the 208 VAC to the heater and pumps, and opening the Interlock circuit. If pressed, the EPO button's mechanical contacts will open and remain engaged until the user twists and pulls the button to the disengaged position. The EPO is connected in series with the Main Contactor coil. When disengaged, the CDO will remain off until the user re-starts the system. CAUTION! Pressing the EPO button could allow hot or untreated process and purge gases to exit the CDO to the house ducting because the recirculation water is shut off. These gases could melt various types of plumbing XX CDO 863 LRA, IO&M manual 5-7

49 CDO start-up Start-up procedures WARNING! Prior to performing any checks inside the electrical enclosure, ensure that power is isolated from the CDO. Steps 1 through 25 are to be performed with power isolated from the CDO. Table 5-5: CDO start-up check sheet Date: Model: Serial.: Process Information: Customer: Starting Test Time: Stopping Test Time: Watlow Serial.: Watlow MFG. Date: Tank Serial.: Customer POC: Voltage: Current: Power: NOTE: Refer to Chapter 6 for interlock and system status configuration for each alarm. INIT ITEM Test Description INIT ITEM Test Description 1. Required clearance met 23. Upper secondary inspection 2. Line connections to inlet 24 Fill tanks 3. Exhaust set to 4.5±3 WC 20 CFM 25. Set up plumbing valves 4. Cabinet exhaust set to 85 CFM 26. Inspect tank plumbing for leaks 5. Drain connected 27. Perform turn-on procedures 6. Fresh water PSI 28. Verify watlow parameters Micron filter (fresh water) 29. Record heater element current 8. Chilled water connected 30. Verify low temperature alarms 9. Interlock connected to tool 31. Verify nitrogen pressure alarms 10. System status connected to tool 32. Verify nitrogen sleeve alarms 11. CDA 90 PSI 33. Verify air (CDA) alarm 12. Nitrogen 80 PSI 34. Verify exhaust temperature alarm 13 Reagent water 15 PSI 35. Verify drain flow alarm 14. Power cable installed correctly 36. Verify water flow alarms 15. Perform check of wires (pull test) 37. Verify inlet pressure alarms 16. Electrical component Inspection 38. Verify sump alarm 17. Check heater element resistance 39. Verify reagent flow alarms 18. Inlet / body tube inspection 40. Verify liquid level alarms 19. Thermocouple 1/16 alignment 41. Temperature controller 20. Vortex inspection 42. Remote box and cable (optional) 21. Crossover inspection 43. System setup 22. Lower secondary inspection 44. Verify all flow settings 5-8 CDO 863 LRA, IO&M manual XX

50 CDO 863 Instalation, Operation, and Maintenance Manual Interlock/sensor operational status 6.1 Front panel interlock/sensors Chapter 6 A series of indicator lights on the CDO front panel reflects sensor operational status. (See Table 5-4, CDO front panel components.) Indicator lights may be green, red, yellow, or not illuminated to indicate the following: Green indicates that the sensor circuit described is satisfied. Red indicates sensor circuit fault. When a sensor is in fault mode, an audible alarm sounds. Yellow indicates that a fault occurred but has corrected itself (except for Fresh Water Fault). Press the Fault Reset switch to reset the indicator light to green. The cool-down LED is yellow when the CDO is in cool-down mode. t illuminated indicates that the associated system is not monitored. The CDO Operational Status indicator LED reflects the status of the CDO Interlock(s), which is a circuit that allows for communication between the CDO and the process tool(s). The CDO interlock circuit consists of four (4) normally open sets of dry contacts. The interlock CDO connections are four 4-pin mic-jack type connectors (see Figure 4-2 Item 10). Connection of the Interlock(s) is made via dry contacts and is the responsibility of the end user XX CDO 863 LRA, IO&M manual 6-1

51 Interlock/sensor operational status Front panel interlock/sensors The CDO is also equipped with a System Status Connection that enables the user to send a fault signal to a monitoring station. The System Status indicator(s) circuit consists of a set of normally open and normally closed dry contacts that will close/open respectively in the event of ANY fault in the CDO. The System Status Indicator(s) CDO connection is a 3-pin mic-jack type connector (see Figure 4-2 Item 11). Connection of the System Status Indicators is made via dry contacts and is the responsibility of the end user. Refer to Table 6-1 for Interlock status. The definition of the action to take is described below: OPEN: The process should be terminated and a trained technician should determine the CDO fault using the indicators. The technician can then perform the necessary troubleshooting and repair steps using Chapter 9 and Chapter 10 as a reference. CLOSED: The process can be completed after which a trained technician should determine the CDO fault using the indicators. The technician can then perform the necessary troubleshooting and repair steps using Chapter 9 and Chapter 10 as a reference. The CDO is also equipped with a Life Safety Connection that enables the user to send a fault signal to a monitoring station. The Life Safety indicator circuit consists of a set of normally closed dry contacts that will open in the event of ANY fault in the CDO. The Life Safety Indicator CDO connection is a 2-pin mic-jack type connector. Connection of the Life Safety Indicator is made via dry contacts and is the responsibility of the end user. te: Life Safety Interlock contacts are the same as System Status N/C Connectors 6-2 CDO 863 LRA, IO&M manual XX

52 Indication (Red) CDO Operational Status Supply N 2 Flow Interlock/sensor operational status Front panel interlock/sensors Table 6-1: CDO interlock/sensor operational status Fault Condition System temperature is below 650 C System temperature is above 650 C when the thermocouple is disconnected Low or no nitrogen flow Low or no air flow Exhaust temperature exceeds 50 C Drain Flow is clogged Low or no Recirculation Water Flow Low or High flow of Reagent Inlet Pressure Alarm Sump Pump Alarm Catch Basin Alarm Low or no Supply nitrogen flow: Fault indicator turns red. Removes power from heater circuit Air Flow Low or no clean dry air supply: Fault indicator turns red. Turns off reagent flow Exhaust Temp. Exhaust temperature exceeds 50 C: Fault indicator turns red. Removes power from heater circuit. N2 purge is activated. Drain Flow Drain Flow light turns red if liquid drain clogs: Fault indicator turns red. Make up water shuts off. Recirculation water flow shuts off. Removes power from heater element. Water Flow Recirculation water low (below 3.0 gpm): Fault indicator turns red. Removes power from heater element. N2 purge is activated. Fresh water low (below 0.25 GPM): Fault indicator turns yellow. Interlock Status Open = FAULT N/O Connectors (Open=Fault) System Status Open Open Closed Open Open Closed Open Open Closed Open Open Closed Open Open Closed Open Open Closed Closed Open Closed N/C Connectors (Closed=Fault) XX CDO 863 LRA, IO&M manual 6-3

53 Interlock/sensor operational status Front panel interlock/sensors Indication (Red) Inlet Pressure Inlet pressure exceeds upper or lower set-point: Fault indicator turns red. Sump Pump The sump water level reaches a high alarm mode: Fault indicator turns red. Make up water shuts off. Sump pump turns on. Sump pump turns off if: low liquid level sensor is detected, 45 seconds of high sensor, or 90 seconds of high/high sensor. Reagent Flow Fault Condition The LRA has low or excess flow: Fault indicator turns red. Liquid Level Water has been detected in the Catch Basin: Fault indicator turns red. Make up water shuts off. Recirculation pump is turned off. Removes power from heater element. Water has been detected in the Drip Tray: Fault indicator turns yellow Interlock Status Open = FAULT N/O Connectors (Open=Fault) System Status Open Open Closed Open Open Closed Closed Open Closed Open Open Closed Closed Open Closed Preheater Preheater is: <100 o C or >400 o C. Closed Open Closed Temp Power Loss of power to CDO, EPO shutdown or off button pressed. Open Open Closed N/C Connectors (Closed=Fault) 6-4 CDO 863 LRA, IO&M manual XX

54 CDO 863 Instalation, Operation, and Maintenance Manual 7.1 CDO Shutdown CDO Shutdown Chapter 7 te For optimum heater element and thermocouple life, continuous operation of the CDO system is recommended. Frequent cycling of the element from ambient to high temperature will reduce the life expectancy of both the element and the thermocouple. If maintenance or service is to be performed on the CDO, follow the shutdown procedure as outlined in Chapter 8, "Preventative maintenance". 1. To turn off the CDO, push the Off Switch on the front panel. The alarm will sound. Press Alarm Silence. In the event of an emergency, pressing the Emergency Power Off (EPO) button will remove 24 VAC to the Main Contactor, thereby de-energizing 24 VAC circuitry which in turn removes the 208 VAC to the heater and pumps, opens the System Status and Interlock circuits. If pressed, the EPO button's mechanical contacts will open and remain engaged until the user twists and pulls the button to the disengaged position. The EPO is connected in series with the Main Contactor coil. When disengaged, the CDO will remain off until the user restarts the system. 2. When the CDO is turned off or power fails, nitrogen flows into the CDO through a normally open solenoid valve (See Figure 4-9 CDO 863 system flow diagram ). If the CDO will be turned off for extended periods of time, turn off the nitrogen supply to reduce nitrogen consumption XX CDO 863 LRA, IO&M manual 7-1

55 CDO Shutdown CDO Shutdown 3. When the CDO Off button is depressed, a 40-minute time delay is started. Water continues to flow for 40 minutes. This protects gaskets, critical sensors, and switches during CDO cool down. 4. Restarting the CDO during the 40-minute timer resets the time delay. 5. If the rotometers and temperature controller are left at the proper settings, restarting the CDO system only requires pushing the On switch, Alarm Silence, and Reset switch, then waiting for the green CDO Operational Status indicator light. If the Auto Restart Switch is activated prior to shutdown, the CDO will automatically start when power resumes. 6. If the sump tank needs to be drained, set the valves in accordance with Table 5-3 and Figure 5-1. Turn the sump toggle switch (located at the tank near the right side of the front window) to the manual position. (Refer to Section ). 7-2 CDO 863 LRA, IO&M manual XX

56 CDO 863 Instalation, Operation, and Maintenance Manual Preventative maintenance Chapter 8 WARNING! Before inspecting or servicing the CDO system, stop process tool gas flows, then disconnect it from all power. Only technically competent and trained personnel should perform maintenance, testing, and contact with electrical components and heater elements. In the event of a leak follow all factory Safety Protocol. Address any problems, difficulties or questions by calling ATMI Central Services at (888) [(707) internationally] or by contacting your regional ATMI representative. WARNING! Due to the potentially hazardous and/or toxic nature of the dust and particulate by-products which accumulate in the system, wear protective clothing and breathing apparatus when inspecting and cleaning the system. CAUTION! Periodic inspection and cleaning of the CDO is absolutely essential. CAUTION! In order to prevent physical contact with potentially sharp objects in the CDO, it is important to visually inspect any equipment prior to handling. te Frequency and duration of maintenance depends upon the CDO unit's specific application. Until a preventative maintenance schedule can be established for your system, follow Table 8-1 for maintenance guideline XX CDO 863 LRA, IO&M manual 8-1

57 Preventative maintenance Decontamination procedure te For potential process chemicals to which personnel may be exposed during normal maintenance activities refer to Appendix B, "Typical process gases". 8.1 Decontamination procedure WARNING! HF may be present and can cause severe burns to the skin and eyes. It is extremely irritating and corrosive to the skin and mucous membranes. Precaution should be taken to prevent skin and eye contact. Wear required Personal Protective Equipment. Use additional local exhaust and/or approved respiratory protection. Consult with your Safety Professional or Industrial Hygienist to determine the required exhaust rates and specific PPE. Do not work alone Purpose Procedure To establish a procedure for controlling, containing, maintaining and decontamination of ATMI' contaminated equipment (HF) at a customer site Review customer' s evacuation plan, safety procedure, and identify nearest safety eyewash station and shower Contact the site representative and have all the process gases off. (Determine and follow the appropriate Lock Out- Tag out steps before performing the decontamination procedure) Drain all free flowing liquid by opening the drain-out valve and turning the pump switch from auto to manual mode. (Open the city water inlet valve and circulate the system with fresh water for at least 30 minutes). Potentially contaminated areas: Secondary section tower Fluid reservoir Cross Over section Reactor 8-2 CDO 863 LRA, IO&M manual XX

58 Preventative maintenance Decontamination procedure Consult your company's policy on waste water and waste wipes disposal and on bringing an acid neutralizer and calcium gluconate gel into a clean room. 1. Any liquids and contaminated material should be considered hazardous and disposed in accordance with local regulations and facility policy. 2. Use only polyethylene and polypropylene containers for the containment of residue that may contain HF (Do not use glass container) Triple rinse the contaminated section/part with city water Spray acid neutralizer solution, and wipe off with paper towels or other wipes Conduct a wipe test by applying a Fluoride chem strip on the wet surface Go back to step , if the reading is positive for Fluoride PPE and equipment Wear appropriates PPE, which include: Safety glasses and face shield Gloves: Butyl Rubber, Teflon, Saranex, Tychem 10000, Nitrile Rubber, Barricade, Neoprene (<4hr), Natural Rubber (< 4 hr) are acceptable for HF. All nature rubber, neoprene, and nitrile rubber gloves with less than 0.3mm in thickness are not recommended. Poly-coated tyvek suit Chemical resistant shoes / overshoes Equipment shall include: Acid Neutralizer Solution suitable for neutralizing HF Chem Strips for Fluoride XX CDO 863 LRA, IO&M manual 8-3

59 Preventative maintenance Required maintenance equipment Medical emergency response Skin and eye contact may not be immediately evident. Report all suspected exposures to the medical department after flushing the affected area Contact with HF/ Skin: 1. Go to the nearest safety shower and wash the contacted skin area (s) for at least 15 minutes. 2. Remove contaminated clothing and dispose of as hazardous waste. 3. Have Calcium Gluconate gel applied as required on the contacted skin area (s). 4. Inform the on-site safety representative. 5. Seek further treatment at the nearest hospital/clinic Contact with HF/ Eyes: 1. Go to the nearest eyewash station. 2. Keep eyes open and rinse with water for at least 15 minutes. 3. Inform the on-site safety representative. 4. Seek treatment at the nearest hospital/clinic. 8.2 Required maintenance equipment Clothing At a minimum, the following should be observed: Acid-proof/heat-resistant gloves Appropriate breathing apparatus Acid Apron Safety glasses Tools Mirror Flat scraper Bucket 8-4 CDO 863 LRA, IO&M manual XX

60 Preventative maintenance Required maintenance equipment Multimeter, Fluke 29 or equivalent Ammeter Fluke 31 or equivalent WARNING! Before inspecting or servicing the CDO system, stop process tool gas flows, then disconnect it from all power. Only technically competent and trained personnel should perform maintenance, testing, and contact with electrical components and heater elements. In the event of a leak follow all factory Safety Protocol Preventative maintenance guidelines The Table 8-1 lists the guidelines for preventative maintenance of the CDO 863. Refer to Chapter 11 for part numbers Table 8-1: Preventive maintenance. Item Inspect Test Replace Perform CDO Cleaning Monthly - Parts as needed Inlet Lines and connection Monthly - Parts as needed Inlet Magnehelic Monthly Monthly Parts as needed Inlet Assembly Monthly - Parts as needed Heater Element Assembly - Monthly 18 Months Power Feed through and connections Monthly - 18 Months Body Tube (Inside) 18 Months - Parts as needed Body Tube Air Orifice Monthly Monthly Parts as needed Liner Monthly - Parts as needed Transition Section Monthly - Parts as needed Water Spray nozzles and Y-strainer Monthly Monthly Parts as needed Conductivity Probe and Purge Monthly Monthly Parts as needed Slope Drain Monthly - Parts as needed Upper and Lower Tower Monthly - Parts as needed Packing Cartridge Monthly - Parts as needed Packing Material and Screen. Monthly - 12 Months RTD Probe and Bimetallic Sensor Monthly Monthly Parts as needed Exhaust Magnehelic Monthly Monthly Parts as needed CZR Monthly Monthly Parts as needed N 2, H 2 O, CDA Flow Sensors Monthly Monthly Parts as needed N 2 Solenoid Monthly Monthly Parts as needed CDA Solenoid Monthly Monthly Parts as needed H 2 O air operated valve Monthly Monthly Parts as needed XX CDO 863 LRA, IO&M manual 8-5

61 Preventative maintenance Maintenance procedures Item Inspect Test Replace Thermocouple Monthly Monthly 6 months Temperature Controller Monthly Monthly Parts as needed Tank Vapor Relief Line Monthly - Parts as needed Liquid Level Sensors Monthly Monthly Parts as needed Recirculation Pump Monthly Monthly Parts as needed Sump Pump Monthly Monthly Parts as needed Recirc./Sump Valves and Plumbing Monthly Monthly Parts as needed Gaskets Monthly - Upon Disassembly O-Rings Monthly - 6 Months Interlocks/Alarms Monthly Monthly Parts as needed Vaporizer Monthly Monthly Parts as needed Reagent Flow Switch Monthly Monthly Parts as needed Reagent water filter/ DI cartridge Weekly Weekly Monthly WARNING! Due to the potentially hazardous and/or toxic nature of the dust and particulate by-products which accumulate in the system, wear protective clothing and breathing apparatus when inspecting and cleaning the system. 8.3 Maintenance procedures Preparing for maintenance procedures When performing the following procedures, refer to Figure 5-1, CDO 863 tank plumbing and Figure 5-2, Front Panel When performing CDO Shutdown for maintenance or service, turn off the heater breakers (see Figure 5-2, Item 5) and open the fast-fill valve half-way (Figure 5-1, Item V9). Allow the unit to cool down, then flush the tank for a minimum of one hour to allow the ph of the recirculation water to reach Prior to commencing work, test the ph of recirculation water. If required, continue to flush the system. 2. After 60 minutes, press the off button and turn off the main breaker on the front panel and all circuit breakers located on the inside of the electrical drawer. 8-6 CDO 863 LRA, IO&M manual XX

62 Preventative maintenance Maintenance procedures! WARNING HAZARDOUS CHEMICALS LOCATED INSIDE ENCLOSURE PROPER CLOTHING AND BREATHING APPARATUS SHOULD BE USED WHEN SERVICING! DANGER! DANGER HIGH VOLTAGE LOCATED WITHIN DRAWER EQUIPMENT MUST BE LOCKED OUT BEFORE SERVICE HIGH VOLTAGE LOCATED WITHIN CABINET EQUIPMENT MUST BE LOCKED OUT BEFORE SERVICE! DANGER! WARNING HOT SURFACE WITHIN CABINET ALLOW UNIT TO COOL DOWN BEFORE SERVICING HAZARDOUS CHEMICALS LOCATED INSIDE ENCLOSURE PROPER CLOTHING AND BREATHING APPARATUS SHOULD BE USED WHEN SERVICING Figure 8-1: Operation and maintenance pictorial hazards XX CDO 863 LRA, IO&M manual 8-7

63 Preventative maintenance Maintenance procedures Secure the following: Electrical power Water Nitrogen Hydrogen Clean dry air Process and pump purges Fast-Fill Valve (Figure 5-1, Item V9) Verify that the Multimeter is functional by testing it on a known live source. 1. Extend the electrical chassis and remove the lower electrical panel and verify that no electrical power is present on the top (input) to TB1. (Refer to Chapter 12, Electrical Drawer Component Wiring) 2. Remove the Multimeter, replace the lower electrical panel, and close the electrical drawer Position drip pan to catch as much water as possible when fittings are loosened Replacing DI water cartridges Both cartridges should be replaced monthly to minimize unintended down time. This assembly is equipped with a shut off value and a lighted indicator. The light will illuminated green when the purity of the water in the system is adequate. When the water purity drops below satisfactory the light will illuminate red, indicating the need to replace both cartridges. A significant drop in pressure may also indicate the need for cartridge replacement. A failure to replace the DI and filter cartridges at least monthly will result in water-borne minerals coating, and eventually plugging, the reagent vaporizer. When this happens, backpressure from the air source will stop the flow of liquid reagent to the CDO, and CDO liner failure will result. te If the DI and filter cartridges are not replaced monthly, secondary failures will occur and will not be covered under warranty. 8-8 CDO 863 LRA, IO&M manual XX

64 Preventative maintenance Maintenance procedures WARNING! Disconnect power supply before servicing! CAUTION! Depressurize system before servicing! If necessary, shut-down the CDO according to Chapter Disconnect power to the water purity indicator Close shut-off valve Place a container under the cartridge to collect spillage Press the vent button on top of the canister head to bleed water pressure at canisters Remove the canisters from the head and drain into the container Remove old cartridges and discard Inspect the o-rings and replace if necessary Install new cartridges. Figure 8-2: DI water assembly XX CDO 863 LRA, IO&M manual 8-9

65 Preventative maintenance Maintenance procedures Check all connections, open shut-off valve, and pressurize. Check for leaks If no leaks are found, restore power to water purity indicator If necessary, start-up the CDO according to Chapter Removing and inspecting the slope drain Disconnect the slope from the wastewater drain line and from the Transition Section Inspect for any build-up or signs of deterioration. Clean or replace as necessary Inspect o-rings for sign of deterioration. Replace as necessary Removing the transition section Disconnect the connections that supply water to the U-jet assembly and Vortex Remove the KF25 clamp securing the conductivity probe to the chamber Remove the Conductivity Probe and inspect for any buildup or deterioration. Clean or replace as necessary Inspect the O-ring for signs of deterioration. Replace as necessary Remove the clamps securing the transition section to the body tube and the lower secondary section Lower the transition section straight down using caution not to damage the U-jet assembly Remove the transition section from the cabinet Remove the O-rings and put the transition section back in place. Inspect and confirm the mounting surfaces of the primary and secondary both align with the transition section CDO 863 LRA, IO&M manual XX

66 8.3.5 Inspecting the transition section Preventative maintenance Maintenance procedures Inspect the U-jet Assembly to ensure water is not restricted by particulate build-up or sign of deterioration. Clean or replace as necessary Inspect the Transition Section for any signs of etching of the base metal Inspect the Conductivity Probe Chamber for signs of buildup or deterioration. Clean or replace transition section as necessary Inspect the O-rings and gaskets of the Conductivity Probe Chamber for signs of deterioration. Replace as necessary Inspecting the liner Position a mirror at the bottom of the liner and visually inspect for build-up or deterioration on the liner. Clean or replace as necessary Inspect the inlet assembly for signs of build-up. Perform step as necessary Cleaning the liner Clean out the bottom halves of the primary and secondary Cooling/Scrubbing section Remove any powder buildup on the liner. Remove any powder accumulated near the inlet nozzle(s) Scrape away and remove any loose particulate on the Inconel liner. te The Body Tube can be rotated forward or back for ease of maintenance. Perform the following steps if this is required XX CDO 863 LRA, IO&M manual 8-11

67 Preventative maintenance Maintenance procedures Rotating the body tube (if needed) Perform Step if needed Disconnect the Air purge fitting to the Body Tube Perform Step Disconnect the vortex water connection Pivot the slide rail locks up to allow the slides to operate Slide CDO Reaction Chamber to front of cabinet. 1. Loosen 7/8 NF jam nuts on pivot arms. 2. Rotate Reaction Chamber into horizontal position for service. 3. Tighten 7/8 NF jam nuts to secure Reaction Chamber in place for service Reverse the order to place the Body Tube in the vertical position Check alignment with a level and tighten jam nuts Ensure all gaskets are in place Cleaning the inlet assembly (if needed) CAUTION! Be certain that all plumbing leading to the CDO, including the reagent line, has been purged with nitrogen Disconnect the Inlet Magnehelic connection and process inlet line(s) at Inlet Oxygenator Section Inspect the O-rings for signs of deterioration. Replace as necessary Remove all bolts facing down securing the inlet to the body chamber Remove nuts, washers, and green ground wire from the back of the inlet CDO 863 LRA, IO&M manual XX

68 Preventative maintenance Maintenance procedures Disconnect the 1/4 Compression Fittings for the N 2 sleeve and purge Disconnect air line from vaporizer assembly Remove the inlet assembly from the body chamber Clean all interior portions of Inlet assembly Inspect the inlet lines for signs of buildup or deterioration. Clean or replace as necessary Disconnect reagent line from vaporizer assembly Inspect the gaskets for signs of deterioration. Replace as necessary Reverse the procedure to reinstall the inlet Ensure all gaskets are in place Inspecting the thermocouple Perform Section , "Thermocouple removal and replacement" Perform Section , "Testing the thermocouple" Reinstall using Section Inspecting the exhaust Magnehelic Inspect for signs of build up in the line Clean or replace as necessary. te Do not loosen the Secondary-mounting clamp that holds the Cooling/ Scrubbing tower to the cabinet XX CDO 863 LRA, IO&M manual 8-13

69 Preventative maintenance Maintenance procedures Removing and inspecting the secondary scrubbing section Remove the KF50 flange assemblies from the upper and lower scrubbing sections. 1. Inspect the KF50 flange for any signs of corrosion or degradation. Inspect for signs of etching of the metal. 2. Unplug bimetallic sensor connections Remove the clamp securing the upper secondary tower to the lower secondary scrubbing tower. Remove the lower tower from the CDO. Inspect for any signs of etching of the metal. CAUTION! Puncture hazard to hand may exist due to corrosion of the packing cartridge handle leaving sharp protrusions. Carefully inspect cartridge handle with mirror and flashlight prior to reaching hand into the scrubbing tower to remove the cartridge Remove the cartridges from both towers. Inspect for any signs of etching of the metal Inspect the gaskets and o-rings for signs of deterioration. Replace as necessary Ensure all gaskets are in place Cleaning the secondary scrubbing section Clean the bottom and top halves of the secondary scrubbing towers Clean or replace the packing material and screens in both the upper and lower cartridges as necessary Inspect the KF50 flange assembly for both the upper and lower secondary section. 1. Inspect the Spray nozzles for build-up or sign of deterioration. Clean or replace as necessary. 2. Inspect the RTD probe and bimetallic sensor for signs of build-up or deterioration. Clean or replace as necessary CDO 863 LRA, IO&M manual XX

70 Preventative maintenance Inspecting and cleaning the vapor relief line Maintenance procedures Inspect the poly line that goes from the top of the tank inside the CDO cabinet to the Secondary Scrubbing section for signs of build-up. Clean or replace as necessary Inspect the O-rings for signs of deterioration. Replace as necessary Inspecting the facilities exhaust lines Inspect for signs of build-up or deterioration. Clean as necessary Inspect the gaskets for signs of deterioration. Replace as necessary Inspecting the facilities drain line Inspect for signs of build-up or deterioration. Clean as necessary. STRIP 1/4" TORQUE SPECIFICATION 5.5 in./lbs. TORQUE SPECIFICATION 17.5 in./lbs. STRIP 1/2" TORQUE SPECIFICATION 5.5in./lbs. TORQUE SPECIFICATION 17.5in./lbs. Figure 8-3: Torque specification and wire strip length XX CDO 863 LRA, IO&M manual 8-15

71 Preventative maintenance Maintenance procedures Table 8-2: Electrical torque specifications Part Number Torque Strip Length Location Component Name Min Max Min Max /2 5 1/4 5/16 Upper Drawer EPO Lug Lug Upper Drawer Heater Breaker (Sm. Nut) Lug Lug Upper Drawer Heater Breaker (Lrg. Nut) /2 1/2 GFI Only GFI Crimp Crimp Upper Drawer Main Trip Contactor /2 5 1/2 1/4 5/16 Upper Drawer/Tank Elec. Box CON1/CON2/CON /2 17 1/2 7/16 1/2 Upper Drawer Stop Block for TB /2 5 1/2 1/4 5/16 Upper Drawer Sm/ 2 Pole Jumper /2 5 1/2 1/4 5/16 Upper Drawer Sm/ 4 Pole Jumper /2 17 1/2 7/16 1/2 Upper Drawer/Behind GFI TB1(1) N/G GFI TB /2 5 1/2 1/4 5/16 Upper Drawer TB1 (6-15) /2 17 1/2 NA NA Upper Drawer Lg/ 2 Pole Jumper /2 17 1/2 7/16 1/2 Upper Drawer/Behind GFI TB1 (1) /2 17 1/2 7/16 1/2 Upper Drawer/Behind GFI TB1(3-6) N/G GFI TB /4 5/16 Upper Drawer/Tank Elec. Box Small white terminal block /2 5 3/16 1/4 Upper Drawer/Tank Elec. Box TB2/TB6/TB3/TB4/TB /4 5/16 Upper Drawer LED Board Connector /2 5 1/2 5/16 3/8 Upper Drawer Socket for 16M /2 5 1/4 5/16 Upper Drawer/Tank Elec. Box Socket for CR /2 5 1/2 5/16 3/8 Upper Drawer TD1/Aux. TD /2 5 1/2 5/16 3/8 Upper Drawer TD /2 5 1/2 5/16 3/8 Upper Drawer TD /2 1/2 Upper Drawer HGREL1/HGREL /2 5 1/4 5/16 Upper Drawer/Tank Elec. Box CR4/CR9/CR11-14/CR /2 1/4 5/16 Upper Drawer CR2-3/CR5-8/CR10-11/CR /4 5/16 Upper Drawer Alarm Board Connectors /4 5/16 Upper Drawer PLC Input /4 5/16 Upper Drawer PLC Output /2 5 1/2 1/2 5/8 Upper Drawer Temp. Controller /2 5/8 Upper Drawer Power Supply Crimp Crimp Upper Drawer Main Contactor /2 5/8 Upper Drawer Fuse Holder /2 5 1/4 5/16 Upper Drawer/Tank Elec. Box Din Rail Mounted Socket for CR /2 5 1/2 5/16 3/8 Upper Drawer Din Rail Mounted Socket for TD Inspecting the CDO Inspect electrical components and wiring for any signs of overheating Check wiring at TB1 for correct terminal torque. (Refer to Figure 8-3, Torque specification and wire strip length ) CDO 863 LRA, IO&M manual XX

72 Preventative maintenance Maintenance procedures Check fittings, air-operated valves, flow switches, and flow meters for any signs of leaking, build-up or deterioration. Clean or replace as necessary Reassembling the CDO Reassemble the upper and lower secondary scrubbing tower Install the crossover assembly. 1. Bring the crossover below the body tube and insert the CDO through the compression fitting. 2. Lift the crossover into place and install the gaskets and clamps. 3. Install the conductivity probe purge, and clamp. 4. Connect the wire to the conductivity probe Ensure the power feed though nuts are secure on the Body Tube. (Refer to section 9.2.2) Restoring the CDO to normal operation Turn on power, air, nitrogen, water and reagent to the CDO Perform the Start-up as outlined in Chapter 5, leaving the heater breakers off. te Perform the procedure described in Section , "Performing tank maintenance (as required)" Disconnect the Interlock Cable on the back of the CDO Connect a Multimeter across the Interlock pins 1 and 3 on the back of the CDO and verify that with the Multimeter set to Ohms it reads an open circuit Turn on heater breaker. Once the CDO reaches a set point of 650 C verify that the ohmmeter reads a closed circuit Disconnect the ohmmeter and reconnect the Interlock plug XX CDO 863 LRA, IO&M manual 8-17

73 Preventative maintenance Maintenance procedures Disconnect air purge line from CDO body tube and connect to flowmeter Check for a 3 to 5 liters per minute flow Ensure auxiliary air valve is closed Reconnect the air purge line to the body tube Disconnect the N 2 purge line from the CDO Conductivity Probe. Check for a 3 to 5 liters per minute flow Reconnect the N 2 purge line to the Conductivity Probe Performing tank maintenance (as required) te Be sure to add water to the tank section during maintenance so the pump will not run dry and damage the pump head. Tank maintenance must be done with a cold system to ensure no damage is done to the components. The water is used for cooling as well as scrubbing. This procedure is not intended for removing all of the solid particulate that may accumulate within the tank. A panel on the left-hand side of the tank allows access for removal of particulate. Follow all customer specific guidelines for the removal of particulate Sump tank cleaning 1. Position the Sump Valves for tank maintenance. (Refer to Table 5-3 and Figure 5-1). 2. Turn the Auto/Manual switch, located in the tank on the electrical panel, to Manual and pump out the Sump tank. 3. Open the Quick Fill Valve (Refer to Figure 5-1, V9). Monitoring the water level through the Tank Access window, continue to fill and drain the tanks until they are clean. Close Quick Fill Valve. 4. Turn the Auto/Manual switch to the Auto position. 5. Set the valves for normal operation. 6. Ensure Liquid Level Sensor brackets are secure CDO 863 LRA, IO&M manual XX

74 8.4 Testing the alarms Preventative maintenance Testing the alarms Recirculation tank cleaning 1. Position the Recirculation Valves for tank maintenance (Refer to Table 5-3 and Figure 5-1). 2. The recirculation pump will run continuously. It can be turned off by using its circuit breaker in the electrical drawer. 3. Open the Fast-Fill Valve (Refer to Figure 5-1, Item V9). Monitor the water level through the Tank Access window. Continue to fill and drain the tanks until it is clean. Close the Fast-Fill Valve. 4. Turn off the Recirc/Sump breaker and set the valves so that the Y-strainer screen can be removed and cleaned. 5. Set the valves up for normal operation Verify N 2 supply and sleeve alarm Disconnect the Interlock and System Status Connectors on the back of the CDO. 1. Using an ohmmeter verify that the Interlock and System Status Connectors are satisfied in accordance with Chapter Turn off the N 2 at the wall source. 1. Verify that the N 2 Supply and the CDO Operational Status LEDs turn red, the Air Flow and its LED turn off, and an audible alarm sounds. 2. Silence the alarm. 3. Verify that each of the System Status Connectors is open in accordance with Table Turn on the N 2 at the wall source. 1. Press the Fault Reset. Verify that the alarms are clear. 2. Verify that the connectors are satisfied XX CDO 863 LRA, IO&M manual 8-19

75 Preventative maintenance Testing the alarms Turn off the N 2 at the CDO front panel Rotometer. Verify that N 2 Supply and Operational Status LED's turn red, Air Flow and its LED turn off, and an audible alarm sounds. 1. Silence the alarm. 2. Test all connectors to ensure they are in accordance with Chapter Set N 2 to a minimum setting of 20 slm Verify air (CDA) alarm 4. Press Fault Reset. Verify that the alarms are clear. 5. Verify that the connectors are satisfied in accordance with Chapter Turn off the CDA at the CDO front panel Rotometer. Verify that the Air and CDO Operational Status LED's turn red and an audible alarm sounds. 1. Silence the alarm 2. Test all connectors to ensure they are in accordance with Chapter Set Air to a minimum of 30 SLM. Exact setting is based on the process gases that are being abated. 1. Press Fault Reset. Verify that the alarms are clear 2. Verify that the connectors are satisfied in accordance with Chapter Verify drain flow alarm Remove the KF25 clamp holding in the conductivity probe Remove the probe and verify that N 2 flow can be felt coming from the KF25 plate Place the probe so that it makes contact with the side of the chamber or any grounded part. 1. Verify that the CDO Operation Status and Drain Flow turn red, the Air Flow and H 2 0 and their LED's turn off and an audible alarm sounds CDO 863 LRA, IO&M manual XX

76 8.4.4 Verify water flow alarm Preventative maintenance Testing the alarms 2. Verify that both the Recirculation and Fresh water flowmeters indicates no H 2 O flow, and the recirculation pump is turned off. 3. Test all connectors to ensure they are in accordance with Chapter Silence the alarm and reinstall the probe assembly clamp. 5. Press Fault Reset. Verify that the alarms are clear 6. Verify that the connectors are satisfied in accordance with Chapter Verify that flowmeters indicate flow Turn off the fresh water supply to the CDO. Verify that the H 2 0 LED turns yellow and an audible alarm sounds. 1. Silence the alarm. 2. Test all connectors to ensure they are in accordance with Chapter Turn on the fresh water supply to the CDO. 1. Press Fault Reset. Verify that the alarm is clear. 2. Verify that the connectors are satisfied in accordance with Chapter Turn off the Recirculation/Sump circuit breaker. 1. Verify that the CDO Operation Status and H 2 0 LED turns red, the Air Flow and H 2 0 and their LED's turn off, and an audible alarm sounds. 2. Silence the alarm. 3. Test all connectors to ensure they are in accordance with Chapter Turn on the Recirculation/Sump circuit breaker. 1. Press Fault Reset. Verify that the alarm is clear. 2. Verify that the connectors are satisfied in accordance with Chapter XX CDO 863 LRA, IO&M manual 8-21

77 Preventative maintenance Testing the alarms Verify inlet pressure alarm Increase the draw too greater than Verify that the CDO Operation Status and Inlet LED turns red and an audible alarm sounds. 2. Silence the alarm. 3. Test all connectors to ensure they are in accordance with Chapter Decrease the draw to normal 1. Press Fault Reset. Verify that the alarm is clear. 2. Verify that the connectors are satisfied in accordance with Chapter Decrease the draw to greater than Verify that the CDO Operation Status and Inlet LED turns red and an audible alarm sounds. 2. Silence the alarm 3. Test all connectors to ensure they are in accordance with Chapter Increase the draw to normal 1. Press Fault Reset. Verify that the alarm is clear. 2. Verify that the connectors are satisfied in accordance with Chapter Verify sump(s) alarm(s) Remove the High sensor and allow water to rise to level of High/High sensor. Verify that the CDO Operation Status and Sump LED's turn red, the H 2 O and its LED is off, and an audible alarm sounds. 1. Verify that both the recirculation and fresh water flowmeters indicates no H 2 O flow. 2. Silence the alarm. 3. Test all connectors to ensure they are in accordance with Chapter CDO 863 LRA, IO&M manual XX

78 Preventative maintenance Testing the alarms Reinstall the High sensor. Ensure that the clamp is tight. 1. Verify that the sump pump turns on and continues to pump water out until water level reaches the Low sensor, at which point the sump pump will turn off. 2. Verify that flowmeters indicate flow. 3. Press Fault Reset. Verify that the alarms are clear. 4. Verify that the connectors are satisfied in accordance with Chapter Verify liquid level sensors On the Drip Tray below the slope drain in the CDO cabinet, move the sensor up using your fingers. Verify the Liquid Level Sensor LED turns yellow and an alarm sounds 1. Test all connectors to ensure they read in accordance with Chapter Silence the alarm and release the sensor. 3. Press Reset. Verify that the alarm is clear. 4. Verify that the connectors read in accordance with Chapter On the Catch Basin, move the sensor up. It is located out of view in the area near the recirculation pump. 1. Verify that the Liquid Level Sensor and CDO Operational Status LED's turn red, Air Flow and H 2 O LED's turn off, and an audible alarm sounds. 2. Verify that both the Recirculation and Fresh water flowmeters indicate no flow. 3. Test all connectors to ensure they read in accordance with Chapter Silence the alarm and release the sensor. 5. Press Fault Reset. Verify that the alarm is clear. 6. Verify that flowmeters indicate flow. 7. Verify that the connectors read in accordance with Chapter XX CDO 863 LRA, IO&M manual 8-23

79 Preventative maintenance Testing the alarms Verify the temperature controller Verify that the Temperature Controller indicates a run away temperature when the Thermocouple is unplugged. This simulates an open or failed thermocouple Unplug both connectors at the control thermocouple. 1. Verify that the Controller lower display reads input 1 failure. 2. Verify that the CDO Operational Status LED turns red, Air Flow and its LED turn off, and an audible alarms sounds. 3. Silence the alarm. 4. Test all connectors to ensure they read in accordance with Chapter Plug the connector back in. 1. Verify that the upper display indicates a temperature reading Press the Fault Reset button and verify that the alarm is clear Verify that the connectors read in accordance with Chapter Repeat steps 1 through 4 for each connector on the thermocouple (up to three) Verify the reagent flow alarm Disconnect the compression fitting at the inlet to the DI water flow switch. 1. Verify that the Reagent Flow LED on the front panel turns red, and an audible alarm sounds. The CDO Operational Status LED should remain green. 2. Silence the alarm Reconnect the DI water compression fitting at the flow switch Press the Fault Reset button and make sure that the fault has cleared CDO 863 LRA, IO&M manual XX

80 CDO 863 Instalation, Operation, and Maintenance Manual Service operations Chapter 9 WARNING! HIGH VOLTAGE IS PRESENT INSIDE THE ELECTRICAL CHASSIS BOX. PLEASE USE CAUTION! ATMI requires Lockout/Tag-out to be performed before working on a specific piece of equipment. The equipment must be locked and tagged out of all the energy sources before beginning work. Each factory on site may have additional controls. Follow specific Factory policies when performing Lockout/Tagout of the CDO. Absolutely no group or custodial locks will be used. Group and Custodial locks infer one (1) lock representing all employees working on that particular tool or system. WARNING! When major service is required, allow the unit to cool until the body tube, heater element, and Inconel liner are at room temperature, and the ph of the recirculation water is at 7.0. If the unit is not allowed to cool down, component damage could occur. WARNING! In order to prevent physical contact with potentially sharp objects in the CDO, it is important to visually inspect any equipment prior to handling. 9.1 CDO thermal reaction chamber Refer to Chapter 8, for information about servicing the Thermal Reaction Chamber XX CDO 863 LRA, IO&M manual 9-1

81 Service operations Heater element 9.2 Heater element See Figure 11-1 Exploded View Testing the heater element Turn off, lock out, and tag out the power to the CDO Slide out the electrical chassis, secure it, and remove the covers Place ohmmeter probes with one probe at NO 12-4 heater wire CZR 1 terminal 2 and wire #7 at TB1-2. (See Chapter 12, CDO Electrical Component Wiring ) Verify that the ohmmeter reads approximately ohms. If the ohmmeter reads an open circuit and you can verify that all wiring is intact, the heater element has failed and must be replaced Verify that there is no conductance between the element leads and chassis ground. If there is conductance, then the thermocouple and/or the element must be replaced Element assembly replacement Follow the procedures in Chapter 8, Items 8.3.3,8.3.4, 8.3.8, 8.3.9, & ). CAUTION! Ensure that the Power Feed Through stud does not rotate and that the innermost nut remains seated against the shoulder of the stud's threads throughout these steps. If the stud rotates, a loose internal connection will result, requiring that the inlet assembly be removed for corrective maintenance. If the nut does not remain seated against the shoulder of the stud threads, a loose external connection will result, requiring rework Remove the two outer nuts and the star washer from one of the power feed through outer stud ends, being careful to hold in place with a wrench the nut closest to the insulator. Orientation of components is shown on Figure 9-1, Power feedthrough replacement. 9-2 CDO 863 LRA, IO&M manual XX

82 Service operations Heater element te Procedure , Thermocouple removal and replacement must be done prior to step Remove power feed-throughs Remove heater element assembly Inspect the inside of the body tube for any signs of deterioration Install the new element assembly with new power feedthrough and new gaskets Install the first nut on both the inside and outside of the power feed-through, then install the assembly in the body tube Place the ring of the high temperature lug on the outer end of the stud, next to the nut Hand-thread one nut after the lug Hold the inner nut with the 3/8 open-end wrench and torque the nut just installed by hand to 20 inch pounds using the torque wrench. Confirm that the stud did not rotate and that the barrel of the lug extends to the rear of the cabinet Slide one washer onto the outer end of the stud Hand-thread one more nut onto the outer end of the stud. Complete the outer connection by holding the innermost nut installed on the outer end of the stud with open-end wrench and using the torque wrench to torque the last nut to 20 inch pounds Once again, verify that the stud did not rotate. Confirm that the innermost nut is still seated against the shoulder of the threads Slide the rubber boot up the wire and over the outside connection so that the stud, nuts, and lug are completely covered XX CDO 863 LRA, IO&M manual 9-3

83 Service operations Water spray nozzle and Y-strainer Figure 9-1: Power feedthrough replacement 9.3 Water spray nozzle and Y-strainer 9.4 LED indicators Restriction of water flow may cause a cooling problem. Clean or replace any clogged water spray nozzle(s). Ensure nozzles are spraying downward. Clogging of the water jets within the CDO can cause a water flow alarm. The jets of the primary cooling section and of the secondary cooling section should be inspected and repaired and/or replaced if necessary. The recirculation plumbing after the pump also contains a y-strainer, which may cause a water flow alarm when clogged. Inspect and replace if necessary. To confirm that the front panel LED indicators have not burned out, use the following procedures when the CDO system is fully operational. 1. Press the Fault Reset Switch. 2. Each LED will cycle from green to yellow to green to red and back to green. 3. If any LED does not cycle, the LED circuitry needs to be repaired or replaced. 9-4 CDO 863 LRA, IO&M manual XX

84 9.5 Conductivity liquid level sensor Service operations Conductivity liquid level sensor This is a Type 3 Electrical Procedure. The conductivity liquid level sensor is located in the Lower Secondary Cooling / Scrubbing Section, utilizing a 12 VAC 1.5 milliamp circuit. If the liquid drain clogs, water level rises and reaches the sensor, and creates a path from probe voltage to ground. A solid state relay control energizes the control relay and activates the CDO Fault Circuit and shuts off water. When water level does not touch the sensor, the electrical circuit is open. If the sensor does not operate in this manner, disconnect the KF-25 clamp and carefully lift out the sensor. Touch the sensor end against a grounded component. An alarm should sound, a red LED fault light should illuminate, and the water flow should shut off. Refer to Figure 12-1, Electrical Schematic. 9.6 Exhaust temperature sensors RTD probe The probe is located at the secondary tower in the lower flange Examine the probe for deterioration Check resistance across the probe leads. The resistance across the white leads should be about 1 ohm. The resistance across either white lead and the red lead should be about 110 ohms. Replace if necessary Bimetallic Sensor The bimetallic strip sensor contacts and activates the switch as metals heat up Remove the bimetallic strip sensor from the top fitting of the scrubbing tower and cool to ambient temperature, then check for continuity. If it shows a closed circuit, cool further with cold water or ice to open the circuit If the circuit opens, re-calibrate the sensor: Place the sensor end into 50 C water (desired set point), then adjust the setscrew until it activates the switch. Replace the sensor if it fails to show an open circuit XX CDO 863 LRA, IO&M manual 9-5

85 Service operations Solid state relay (CZR) DANGER! HIGH VOLTAGE IS PRESENT INSIDE THE ELECTRICAL CHASSIS BOX. 9.7 Solid state relay (CZR) This is a Type 4 Electrical Procedure. 1. Slide out the electrical chassis, secure it, and remove the covers. 2. Set the voltmeter to DC. 3. The Temperature Controller green 1A light should be illuminated. 4. Place probes on the small steel screws facing you. The voltmeter should read about 24 VDC. te The relay will not be activated until 24 volts is applied to the small steel screws. 5. Locate the neutral (white) wire on terminal strip TB1-6. Place the probe at this point. 6. While the CZR1 is activated, check the voltage on pin1 and pin2. The voltmeter should read approximately 110 VAC on pin1 and pin2. If voltage is not present on pin1 and pin2, either the wiring connection is bad, or CZR1 has failed and should be replaced. 7. Repeat steps 1 thorough 6 for CZR Nitrogen and air flow sensors Flow sensors are precision devices and are extremely sensitive to impact, particulate, and fluids. Take care that they are not contaminated while in use or when being serviced. To check sensor operation: 1. Disconnect the sensor wires and remove the sensor from the line. 2. Using an ohmmeter, confirm that the sensor switch is open when it is upright (wires at top) and closed when inverted (wires at bottom). 3. If the sensor switch does not open and close, replace the sensor. The Air Flow Alarm Set Point is 20 SLM. The N 2 Flow Alarm Set Point is 2.5 slm. 9-6 CDO 863 LRA, IO&M manual XX

86 Service operations Solenoid valves 9.9 Solenoid valves Procedures are Type 3 Electrical Procedures Inlet nitrogen solenoid valve The N 2 solenoid valve is normally open. Therefore, without voltage applied, the solenoid valve should be open allowing nitrogen flow. With voltage the solenoid valve should close. Verify 24 VAC to solenoid valve and replace if necessary Inlet CDA and Exhaust Moisture The air solenoid valve is normally closed. Therefore, without voltage applied the solenoid valve will close allowing no flow. When 24 VAC is applied the solenoid valve will be open and flow is allowed. Verify and replace if necessary Water control solenoid valve With no voltage applied to the water control solenoid valve, there should be flow to port A. When 24 VAC is applied to the solenoid valve, flow will be routed to port B. Test both states and replace if necessary Exhaust Moisture Suppression solenoid valve This valve should open when the CDO temperature reaches 650 C. Flow can be verified at the upper secondary tower using the manual valve and listening for flow turning on and off with the valve XX CDO 863 LRA, IO&M manual 9-7

87 Service operations Pneumatically-actuated water control valve 9.10 Pneumatically-actuated water control valve Fresh water control 9.11 Water flow sensors This nitrogen-operated valve is normally closed and should not allow fresh water flow to the CDO unless nitrogen is being supplied to the valve. Verify correct valve operation by viewing water flow through the paddle-wheel sensor located above the sump pump, checking that the sensor vanes are moving (indicating water flow) only when nitrogen is supplied to the valve. Replace the solenoid valve, if necessary Recirculation and vortex flow This switch is a corrosion-resistant magnetic reed switch. When water flow is above the set point, the switch closes. Disconnect the wire coming from the bottom of the switch and use an ohmmeter to verify that the switch closes when the flow is above minimum. Total flow can be viewed at the flowmeter in the cabinet door Fresh water flow Fresh water flow is measured by a paddle-wheel sensor with an adjustable set point. When water flow meets or exceeds the set point, the switch closes. When the flow rate falls below the set point. the switch opens. The red LED on the sensor illuminates when the water flow rate is at an acceptable level Calibration: With the unit installed in line and power supplied, complete the following steps to calibrate switch actuation point with proper flow rate. A small flat-blade screwdriver is the only tool required. 1. Adjust water flow in the line to 0.25 gpm as indicated on the rotometer located at the front of the tank. 2. Insert a screwdriver into the opening on the backside of the housing, and fit the blade into the adjustment screw inside. 3. If the LED is not illuminated, slowly turn the screwdriver counterclockwise and stop as soon as the LED illuminates. 9-8 CDO 863 LRA, IO&M manual XX

88 Reagent water flow 9.12 Thermocouple Service operations Thermocouple 4. If LED is illuminated, turn the screwdriver clockwise until the LED goes out. Then slowly turn the screwdriver counterclockwise and stop as soon as LED illuminates. Reagent water flow is measured by an adjustable magnetic reed switch flowswitch. When water flow exceeds the set point, the switch closes. When the flow rate falls below the set point the switch opens. Verify the switch function by disconnecting DI water line at the flowswitch. The reagent LED should go red. Reagent water will only flow when CDO temperature is above 650 C and CDA is flowing. This is a Type 3 Electrical Procedure Testing the thermocouple If the temperature reads ---- on the CDO front panel indicator, the thermocouple connection is open. If all wiring connections are intact and the plug is connected to the thermocouple, replace the thermocouple Connect a multimeter to the thermocouple prongs and set it for DC millivolts. 1. At 22 C, the reading should be mv 2. At 425 C, the reading should be mv 3. At 850 C, the reading should be mv If an ohmmeter reading indicates an open circuit, the thermocouple has failed and should be replaced Thermocouple removal and replacement Loosen the compression fitting that secures the thermocouple shaft at the body tube Loosen and remove the NPT fitting counterclockwise from the CDO body tube. (It may be necessary to hold the thermocouple while performing this step.) XX CDO 863 LRA, IO&M manual 9-9

89 Service operations Thermocouple Turn the thermocouple 1/4 turn counterclockwise. Remove the thermocouple in the direction shown in Figure 9-2, being careful that the thermocouple clears the heater element. Figure 9-2: Thermocouple removal and replacement 1. Insert the replacement thermocouple into the CDO body tube in the same manner in which it was removed until it rests against the body tube liner, being careful to clear the surface of the heater element. 2. Screw the NPT fitting into the body tube coupling. 3. Push the thermocouple against the body tube liner and then pull it out about 1/16 (0.156 cm). 4. Hand tighten fittings. 5. Rotate the thermocouple 90 so that the plug is pointing up. 6. Turn the compression fitting one-half turn with a wrench to secure it to the thermocouple. Do not tighten more than one-half turn, or you may damage the thermocouple CDO 863 LRA, IO&M manual XX

90 Service operations Temperature controller 9.13 Temperature controller Wiring Figure 9-3: Temperature controller testing and setup This is a Type 4 Electrical Procedure Check the temperature controller supply voltage. 1. Set the voltmeter to AC. 2. Place the probes on Pins 1 and 2. The voltmeter should read about 24 VAC Check output voltage (activates CZR2). 1. The green 1A should be illuminated during this procedure XX CDO 863 LRA, IO&M manual 9-11

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